<div class="csl-bib-body">
<div class="csl-entry">Dabsch, A., Rosenberg, C., Stifter, M., & Keplinger, F. (2018). Temperature dependency of silicon structures for magnetic field gradient sensing. <i>Journal of Micromechanics and Microengineering</i>. https://doi.org/10.1088/1361-6439/aa7d28</div>
</div>
This work describes the temperature dependence of two sensors for magnetic field gradient sensors and demonstrates a structure to compensate for the drift of resonance frequency over a wide temperature range. The temperature effect of the sensing element is based on internal stresses induced by the thermal expansion of material, therefore FEM is used to determine the change of the eigenvalues of the sensing structure. The experimental setup utilizes a Helmholtz coil system to generate the magnetic field and to excite the MEMS structure with Lorentz forces. The MEMS structure is placed on a plate heated with resistors and cooled by a Peltier element to control the plate temperature. In the second part, we describe how one can exploit temperature sensitivity for temperature measurements and we show the opportunity to include the temperature effect to increase the sensitivity of single-crystal silicon made flux density gradient sensors.
en
dc.language
English
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dc.language.iso
en
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dc.publisher
IOP Publishing Ltd
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dc.relation.ispartof
Journal of Micromechanics and Microengineering
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dc.rights.uri
http://creativecommons.org/licenses/by/3.0/
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dc.subject
gradient sensor
en
dc.subject
temperature dependency
en
dc.subject
magnetic field
en
dc.subject
MEMS
en
dc.title
Temperature dependency of silicon structures for magnetic field gradient sensing
en
dc.type
Article
en
dc.type
Artikel
de
dc.rights.license
Creative Commons Attribution 3.0 Unported
en
dc.rights.license
Creative Commons Namensnennung 3.0 Unported
de
dcterms.dateSubmitted
2017-04-04
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dc.rights.holder
2017 IOP Publishing Ltd
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dc.type.category
Original Research Article
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tuw.journal.peerreviewed
true
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tuw.peerreviewed
true
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tuw.version
vor
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dcterms.isPartOf.title
Journal of Micromechanics and Microengineering
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tuw.publication.orgunit
E366 - Institut für Sensor- und Aktuatorsysteme
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tuw.publisher.doi
10.1088/1361-6439/aa7d28
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dc.date.onlinefirst
2017-12-29
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dc.identifier.eissn
1361-6439
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dc.identifier.libraryid
AC15597313
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dc.identifier.urn
urn:nbn:at:at-ubtuw:3-8670
-
dc.rights.identifier
CC BY 3.0
en
dc.rights.identifier
CC BY 3.0
de
wb.sci
true
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item.openaccessfulltext
Open Access
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item.cerifentitytype
Publications
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item.cerifentitytype
Publications
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http://purl.org/coar/resource_type/c_18cf
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item.openairecristype
http://purl.org/coar/resource_type/c_18cf
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item.fulltext
with Fulltext
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item.grantfulltext
open
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item.languageiso639-1
en
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item.openairetype
Article
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item.openairetype
Artikel
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crisitem.author.dept
E366 - Institut für Sensor- und Aktuatorsysteme
-
crisitem.author.dept
E370 - Institut für Energiesysteme und Elektrische Antriebe
-
crisitem.author.dept
E366 - Institut für Sensor- und Aktuatorsysteme
-
crisitem.author.dept
E366-01 - Forschungsbereich Mikro- und Nanosensorik
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crisitem.author.parentorg
E350 - Fakultät für Elektrotechnik und Informationstechnik
-
crisitem.author.parentorg
E350 - Fakultät für Elektrotechnik und Informationstechnik
-
crisitem.author.parentorg
E350 - Fakultät für Elektrotechnik und Informationstechnik