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Record link: 
http://hdl.handle.net/20.500.12708/88642
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Title: 
Development of a high resolution UV contact lithography process for the fabrication of interdigitated electrode arrays
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Citation: 
Partel, S., Zoppel, S., Hairer, G., Stangl, G., & Matay, L. (2007). Development of a high resolution UV contact lithography process for the fabrication of interdigitated electrode arrays. NanoEurope, St. Gallen, Switzerland, Non-EU. http://hdl.handle.net/20.500.12708/88642
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Publication Type: 
Presentation - Poster presentation
en
Authors: 
Partel, S. 
Zoppel, S. 
Hairer, Gabriel 
Stangl, Günther 
Matay, L. 
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Organisational Unit: 
E366-01 - Forschungsbereich Mikro- und Nanosensorik 
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Date (published): 
2007
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Event name: 
NanoEurope 
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Event date: 
11-Sep-2007 - 13-Sep-2007
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Event place: 
St. Gallen, Switzerland, Non-EU
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Science Branch: 
Elektrotechnik, Elektronik
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Appears in Collections:
Presentation

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