SPIE Europe: Microtechnologies for the New Millennium

Event name
SPIE Europe: Microtechnologies for the New Millennium
 
Event type
Event for scientific audience
 
Start date
04-05-2009
Location
Dresden, Deutschland
Country
Europe
 
Event format Veranstaltungsformat
On Site

Publications Publikationen

Results 1-17 of 17 (Search time: 0.003 seconds).

PreviewAuthor(s)TitleTypeIssue Date
1Van den Driesche, Sander ; Witarski, W. ; Vellekoop, Michael J. 3.0-3.7µm infrared sensor system for cell analysisKonferenzbeitrag Inproceedings2009
2Jaksic, Olga ; Jaksic, Zoran ; Matovic, Jovan Adsorption-Desorption Noise in Plasmonic Chemical/Biological Sensors in Multiple Analyte EnvironmentKonferenzbeitrag Inproceedings2009
3Egretzberger, Markus ; Kugi, Andreas An envelope model to describe the sensor dynamics of vibratory gyroscopesKonferenzbeitrag Inproceedings2009
4Manzaneque, T. ; Hernando-Garcia, J. ; Rodríguez-Aragón, L. ; Ababneh, A. ; Seidel, Helmut ; Schmid, Ulrich ; Sànchez-Rojas, Jose Luis Analysis of the Quality Factor of Piezoelectric-Actuated Micro- ResonatorsKonferenzbeitrag Inproceedings 2009
5Hernando-Garcia, J. ; Sànchez-Rojas, Jose Luis ; Ababneh, A. ; Seidel, Helmut ; Sökmen, Ü. ; Peiner, E. ; Schmid, Ulrich Characterization and simulation of high quality AlN-actuated resonant suspended beamsKonferenzbeitrag Inproceedings 2009
6Ababneh, A. ; Marchand, Günter ; Seidel, Helmut ; Hernando-Garcia, J. ; Sànchez-Rojas, Jose Luis ; Sökmen, Ü. ; Peiner, E. ; Schmid, Ulrich Comparison Between AlN Thin Films with Different Crystal Orientation for MEMS ApplicationsKonferenzbeitrag Inproceedings 2009
7Bienert, C. ; Roosen, A. ; Grosser, M. ; Ziegler, Volker ; Schmid, Ulrich Electrical and Mechanical Characterization of Low Temperature Co-fired Ceramics for High Temperature Sensor ApplicationsKonferenzbeitrag Inproceedings 2009
8Lugstein, Alois ; Avdic, Amra ; Bertagnolli, Emmerich FIB generated antimony nanowires as chemical sensorsPräsentation Presentation2009
9Grosser, M. ; Schmid, Ulrich Influence of Back Pressure and Plasma Power on Grain Size, Phase Composition and Resistivity of Tantalum Thin FilmsKonferenzbeitrag Inproceedings 2009
10Matovic, Jovan ; Jaksic, Zoran Micromechanical sensors based on lateral and longitudinal displacement of a cantilever sensing element: A comparative performance studyKonferenzbeitrag Inproceedings 2009
11Schröck, Johannes ; Meurer, Thomas ; Kugi, Andreas Motion planning for an adaptive wing structure with Macro-fiber Composite actuatorsKonferenzbeitrag Inproceedings2009
12Bittner, Achim ; Klein, S. ; Seidel, Helmut ; Schmid, Ulrich Reliability of Ag Thin Films Sputter Deposited on Silicon and Ceramic Based SubstratesKonferenzbeitrag Inproceedings 2009
13Klein, S. ; Comtesse, C. ; Bittner, Achim ; Seidel, Helmut ; Ziegler, Volker ; Prechtel, Ulrich ; Schmid, Ulrich RF MEMS Switches Based on an Alloy of Aluminum-Silicon-CopperKonferenzbeitrag Inproceedings 2009
14Bolzmacher, Christian ; Bauer, Karin ; Schmid, Ulrich ; Hafez, M. ; Seidel, Helmut Robust Superelastic, Metallic Amplification Unit for Piezoelectric MicroactuatorsKonferenzbeitrag Inproceedings 2009
15Catrin, Rodolphe ; Gachot, Carsten ; Marchand, Günter ; Schmid, Ulrich ; Mücklich, Frank Selective wet chemical etching of metallic thin films designed by Laser Interference Metallurgy (LIMET)Konferenzbeitrag Inproceedings 2009
16Oliver, M. J. ; Hernando-Garcia, J. ; Olivares, J. ; Clement, M. ; Ababneh, A. ; Schmid, Ulrich ; Sànchez-Rojas, Jose Luis Sputtered polycrystalline AlN as a platform for biofunctionalized devicesKonferenzbeitrag Inproceedings 2009
17Gachot, Carsten ; Hans, M. ; Catrin, Rodolphe ; Schmid, Ulrich ; Mücklich, Frank Tuned Wettability of Material Surfaces for tribological Applications in miniaturized Systems by Laser Interference MetallurgyKonferenzbeitrag Inproceedings 2009