Grosser, M.

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Grosser, M.
 

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PreviewAuthors / EditorsTitleTypeIssue Date
1Grosser, M. ; Münch, M. ; Seidel, Helmut ; Bienert, C. ; Schmid, Ulrich The impact of substrate properties and thermal annealing on tantalum nitride thin filmsArtikel Article2012
2Grosser, M. ; Schmid, U. The impact of annealing temperature and time on the electrical performance of Ti/Pt thin filmsArtikel Article2010
3Schmid, Ulrich ; Grosser, M. Room-temperature resistivity of Ti/Pt thin films on LTCC/glass substrates upon high temperature annealingBuchbeitrag Book Contribution2009
4Grosser, M. ; Seidel, Helmut ; Schmid, Ulrich Einfluss der Sputterparameter auf Morphologie, Phasenbildung und elektrische Eigenschaften von dünnen TantalschichtenKonferenzbeitrag Inproceedings2009
5Grosser, M. ; Schmid, Ulrich Influence of Back Pressure and Plasma Power on Grain Size, Phase Composition and Resistivity of Tantalum Thin FilmsKonferenzbeitrag Inproceedings 2009
6Bienert, C. ; Roosen, A. ; Grosser, M. ; Ziegler, Volker ; Schmid, Ulrich Electrical and Mechanical Characterization of Low Temperature Co-fired Ceramics for High Temperature Sensor ApplicationsKonferenzbeitrag Inproceedings 2009
7Grosser, M. ; Schmid, U. The impact of sputter conditions on the microstructure and on the resistivity of tantalum thin filmsArtikel Article2009
8Schmid, U. ; Grosser, M. Electrical performance of Ti/Pt thin films on glass-ceramic substrates after high temperature loadingArtikel Article2009