Journal of Microelectromechanical Systems

View Statistics Email Alert RSS Feed

Journal description

Title Titel
Journal of Microelectromechanical Systems
 
e-ISSN
1941-0158
 
ISSN
1057-7157
 
Publisher Herausgeber
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
 

Publications Publikationen

Filter:
Author:  Schmid, Ulrich

Results 1-5 of 5 (Search time: 0.004 seconds).

PreviewAuthor(s)TitleTypeIssue Date
1Schneider, Michael ; Dorfmeister, Manuel ; Moll, Philipp ; Kaltenbacher, Manfred ; Schmid, Ulrich Bi-Stable Aluminum Nitride-Based Piezoelectric Micromachined Ultrasonic Transducer (PMUT)Artikel Article 2020
2Moll-2022-Journal of Microelectromechanical Systems-vor.pdf.jpgMoll, Philipp ; Pfusterschmied, Georg ; Schneider, Michael ; Dorfmeister, Manuel ; Knafl, Sebastian ; Wanzenböck, Heinz ; Schmid, Ulrich Biocompatible a-SiC:H-Based Bistable MEMS Membranes With Piezoelectric Switching Capability in FluidsArticle Artikel Jun-2022
3Kulygin, Alexander ; Kirsch, Christian ; Schwarz, Patrick ; Schmid, Ulrich ; Seidel, Helmut Decoupled Surface Micromachined Gyroscope With Single-Point SuspensionArtikel Article2012
4Camarda, Antonio ; Sordo, Guido ; Iannacci, Jacopo ; Schneider, Michael ; Schmid, Ulrich ; Tartagni, Marco ; Romani, Aldo Fabrication and Electromechanical Modelling of a Flexural-Mode MEMS Piezoelectric Transformer in AlNArtikel Article 2017
5Mayrhofer, Patrick ; Rehlendt, Christopher ; Fischeneder, Martin ; Kucera, Martin ; Wistrela, Elisabeth ; Bittner, Achim ; Schmid, Ulrich ScAlN MEMS Cantilevers for Vibrational Energy Harvesting PurposesArtikel Article 2017