JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B

Title Titel

e-ISSN

2166-2754

ISSN

2166-2746

Publisher Herausgeber

A V S AMER INST PHYSICS

Publisher's Address Herausgeber Adresse

STE 1 NO 1, 2 HUNTINGTON QUADRANGLE, MELVILLE, USA, NY, 11747-4502

Listed in SCI Aufgelistet im SCI

Peer reviewed Begutachtet

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Subject: Process Chemistry and Technology

Author: Abermann, S.

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		Preview	Author(s)	Title	Type	Issue Date
	1		Bethge, O. ; Abermann, S. ; Henkel, C. ; Smoliner, J. ; Bertagnolli, E. ; Straif, C. J. ; Hutter, H.	Atomic layer deposition temperature dependent minority carrier generation in ZrO2 /GeO2 /Ge capacitors	Artikel Article	2011