MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS

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Journal description

Title Titel
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS
 
e-ISSN
1432-1858
 
ISSN
0946-7076
 
Publisher Herausgeber
SPRINGER HEIDELBERG
 
Publisher's Address Herausgeber Adresse
TIERGARTENSTRASSE 17, HEIDELBERG, GERMANY, D-69121
 
Listed in SCI Aufgelistet im SCI
 
Peer reviewed Begutachtet
 
 

Publications Publikationen

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Subject:  Hardware and Architecture

Results 21-40 of 44 (Search time: 0.004 seconds).

PreviewAuthor(s)TitleTypeIssue Date
21Bittner, A. ; Pagel, N. ; Seidel, H. ; Schmid, U. Long-term stability of Ag and Cu thin films on glass, LTCC and alumina substratesArtikel Article2012
22Beigelbeck, Roman ; Cerimovic, Samir ; Talic, Almir ; Kohl, Franz ; Keplinger, Franz Measurement technique for the thermal properties of thin-film diaphragms embedded in calorimetric flow sensorsArtikel Article 2012
23Iannacci, J. ; Serra, E. ; Sordo, G. ; Bonaldi, M. ; Borrielli, A. ; Schmid, U. ; Bittner, A. ; Schneider, M. ; Kuenzig, T. ; Schrag, G. ; Pandraud, G. ; Sarro, P. M. MEMS-based multi-modal vibration energy harvesters for ultra-low power autonomous remote and distributed sensingArtikel Article 2018
24Cvetanovic, Aleksandra ; Cvetanovic, Andreja ; Soucek, Marek ; Andrijasevic, Daniela ; Brenner, Werner Micro assembly in a SEM chamber and the solution for collision preventionArtikel Article 16-Apr-2008
25Hansal, W. ; Steiner, Harald ; Mann, R. ; Halmdienst, M. ; Schalko, Johannes ; Keplinger, Franz ; Svasek, Peter Microgalvanic nickel pulse plating process for the production of thermal actuatorsArtikel Article 8-Dec-2013
26Alamin Dow, Ali B. ; Schneider, M. ; Koo, David ; Al-Rubaye, Hasan A. ; Bittner, A. ; Schmid, U. ; Kherani, Nazir Modeling the performance of a micromachined piezoelectric energy harvesterArtikel Article2012
27Ruiz, V. ; Hernando-García, J. ; Ababneh, A. ; Seidel, H. ; Schmid, U. ; Sánchez-Rojas, J. L. Modelling and characterization of AlN-actuated microcantilevers vibrating in the first in-plane modeArtikel Article2012
28Tumpold, David ; Kaltenbacher, Manfred ; Glacer, Christoph ; Nawaz, Mohsin ; Dehé, Alfons Multi field modeling of a microelectromechanical speaker system with electrostatic driving principleArtikel Article2014
29Sordo, G. ; Serra, E. ; Schmid, U. ; Iannacci, J. Optimization method for designing multimodal piezoelectric MEMS energy harvestersArtikel Article 2016
30Kulygin, A. ; Gergen, M. ; Schmid, U. ; Seidel, H. Optimizing the Performance of a Coriolis-based Angular Rate Sensor Applying an Analytical ApproachArtikel Article2008
31Manzaneque, Tomás ; Ruiz-Díez, V. ; Hernando-García, J. ; Ababneh, A. ; Al-Omari, A. N. ; Kucera, M. ; Bittner, A. ; Schmid, U. ; Seidel, H. ; Sánchez-Rojas, J. L. Piezoelectric in‑plane microplate resonators based on contour and flexure‑actuated modesArtikel Article2014
32Bohnenberger, Timo ; Steinhäußer, Frank ; Matovic, Jovan ; Schmid, Ulrich Platinated ultrathin films made of carbon nanotubesArtikel Article2012
33Mayrhofer, P. M. ; Persson, P. O. Å. ; Bittner, A. ; Schmid, U. Properties of ScxAl1‑xN (x = 0.27) thin films on sapphire and silicon substrates upon high temperature loadingArtikel Article 2016
34Oliver, M. J. ; Hernando-García, J. ; Ababneh, A. ; Seidel, H. ; Schmid, U. ; Andrés, J. P. ; Pobedinskas, P. ; Haenen, K. ; Sánchez-Rojas, J. L. Resonantly excited AlN-based microcantilevers for immunosensingArtikel Article2012
35Bolzmacher, Christian ; Bauer, Karin ; Schmid, Ulrich ; Hafez, Moustapha ; Seidel, Helmut Robust miniaturized amplification unit for piezoelectric actuators: comparison of single crystal silicon and superelastic nickel titanium as membrane materialsArtikel Article2010
36Kiziroglou, M. E. ; Elefsiniotis, A. ; Kokorakis, N. ; Wright, S. W. ; Toh, T. T. ; Mitcheson, P. D. ; Schmid, U. ; Becker, Th. ; Yeatman, E. M. Scaling and super‑cooling in heat storage harvesting devicesArtikel Article 2016
37Cerimovic, Samir ; Beigelbeck, Roman ; Antlinger, Hannes ; Schalko, Johannes ; Jakoby, Bernhard ; Keplinger, Franz Sensing viscosity and density of glycerol-water mixtures utilizing a suspended plate MEMS resonatorArtikel Article 2012
38Schmid, Ulrich ; Becker, Thomas ; Michel, Bernd Special issue of the conference 'Smart Sensors, Actuators andMEMS', within the SPIE EUROPE Symposium 'MICROTECHNOLOGIES' Prague, Czech Republic, 18-20 April 2011Artikel Article2012
39Grosser, Michaela ; Münch, M. ; Brenner, J. ; Wilke, M. ; Seidel, H. ; Bienert, C. ; Roosen, A. ; Schmid, U. Study on microstructural, chemical and electrical properties of tantalum nitride thin films deposited by reactive direct current magnetron sputteringArtikel Article 2010
40Schneider, Michael ; Bittner, Achim ; Schmid, Ulrich Temperature dependant dielectric breakdown of sputter‑deposited AlN thin films using a time‑zero approachArtikel Article2014