Record link: 
http://hdl.handle.net/20.500.12708/156136
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Title: 
Microgalvanic nickel pulse plating process for the production of thermal actuators
en
Citation: 
Hansal, W., Steiner, H., Mann, R., Halmdienst, M., Schalko, J., Keplinger, F., & Svasek, P. (2013). Microgalvanic nickel pulse plating process for the production of thermal actuators. Microsystem Technologies, 20(4–5), 681–689. https://doi.org/10.1007/s00542-013-2007-5
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Publisher DOI: 
10.1007/s00542-013-2007-5
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Publication Type: 
Article - Original Research Article
en
Language: 
English
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Authors: 
Hansal, W. 
Steiner, Harald 
Mann, R. 
Halmdienst, M. 
Schalko, Johannes 
Keplinger, Franz 
Svasek, Peter 
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Organisational Unit: 
E366-01 - Forschungsbereich Mikro- und Nanosensorik 
E366-50 - Services des Instituts 
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Journal: 
Microsystem Technologies 
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ISSN: 
0946-7076
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Date (published): 
8-Dec-2013
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Number of Pages: 
9
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Publisher: 
SPRINGER HEIDELBERG
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Peer reviewed: 
Yes
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Keywords: 
Electrical and Electronic Engineering; Hardware and Architecture; Condensed Matter Physics; Electronic, Optical and Magnetic Materials
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Research Areas: 
Sensor Systems: 50%
Structure-Property Relationship: 25%
Special and Engineering Materials: 25%
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Science Branch: 
Elektrotechnik, Elektronik
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