MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS

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Journal description

Title Titel
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS
 
e-ISSN
1432-1858
 
ISSN
0946-7076
 
Publisher Herausgeber
SPRINGER HEIDELBERG
 
Publisher's Address Herausgeber Adresse
TIERGARTENSTRASSE 17, HEIDELBERG, GERMANY, D-69121
 
Listed in SCI Aufgelistet im SCI
 
Peer reviewed Begutachtet
 
 

Publications Publikationen

Results 21-40 of 47 (Search time: 0.007 seconds).

PreviewAuthor(s)TitleTypeIssue Date
21Wistrela, E. ; Schneider, M. ; Bittner, A. ; Schmid, U. Impact of the substrate dependent polarity distribution in c‑axis oriented AlN thin films on the etching behaviour and the piezoelectric propertiesArtikel Article 2016
22Kucera, M. ; Hofbauer, F. ; Wistrela, E. ; Manzaneque, T. ; Ruiz-Díez, V. ; Sánchez-Rojas, J. L. ; Bittner, A. ; Schmid, U. Lock‑in amplifier powered analogue Q‑control circuit for self‑actuated self‑sensing piezoelectric MEMS resonatorsArtikel Article2014
23Bittner, A. ; Pagel, N. ; Seidel, H. ; Schmid, U. Long-term stability of Ag and Cu thin films on glass, LTCC and alumina substratesArtikel Article2012
24Beigelbeck, Roman ; Cerimovic, Samir ; Talic, Almir ; Kohl, Franz ; Keplinger, Franz Measurement technique for the thermal properties of thin-film diaphragms embedded in calorimetric flow sensorsArtikel Article 2012
25Iannacci, J. ; Serra, E. ; Sordo, G. ; Bonaldi, M. ; Borrielli, A. ; Schmid, U. ; Bittner, A. ; Schneider, M. ; Kuenzig, T. ; Schrag, G. ; Pandraud, G. ; Sarro, P. M. MEMS-based multi-modal vibration energy harvesters for ultra-low power autonomous remote and distributed sensingArtikel Article 2018
26Cvetanovic, Aleksandra ; Cvetanovic, Andreja ; Soucek, Marek ; Andrijasevic, Daniela ; Brenner, Werner Micro assembly in a SEM chamber and the solution for collision preventionArtikel Article 16-Apr-2008
27Hansal, W. ; Steiner, Harald ; Mann, R. ; Halmdienst, M. ; Schalko, Johannes ; Keplinger, Franz ; Svasek, Peter Microgalvanic nickel pulse plating process for the production of thermal actuatorsArtikel Article 8-Dec-2013
28Alamin Dow, Ali B. ; Schneider, M. ; Koo, David ; Al-Rubaye, Hasan A. ; Bittner, A. ; Schmid, U. ; Kherani, Nazir Modeling the performance of a micromachined piezoelectric energy harvesterArtikel Article2012
29Ruiz, V. ; Hernando-García, J. ; Ababneh, A. ; Seidel, H. ; Schmid, U. ; Sánchez-Rojas, J. L. Modelling and characterization of AlN-actuated microcantilevers vibrating in the first in-plane modeArtikel Article2012
30Tumpold, David ; Kaltenbacher, Manfred ; Glacer, Christoph ; Nawaz, Mohsin ; Dehé, Alfons Multi field modeling of a microelectromechanical speaker system with electrostatic driving principleArtikel Article2014
31Sordo, G. ; Serra, E. ; Schmid, U. ; Iannacci, J. Optimization method for designing multimodal piezoelectric MEMS energy harvestersArtikel Article 2016
32Kulygin, A. ; Gergen, M. ; Schmid, U. ; Seidel, H. Optimizing the Performance of a Coriolis-based Angular Rate Sensor Applying an Analytical ApproachArtikel Article2008
33Manzaneque, Tomás ; Ruiz-Díez, V. ; Hernando-García, J. ; Ababneh, A. ; Al-Omari, A. N. ; Kucera, M. ; Bittner, A. ; Schmid, U. ; Seidel, H. ; Sánchez-Rojas, J. L. Piezoelectric in‑plane microplate resonators based on contour and flexure‑actuated modesArtikel Article2014
34Bohnenberger, Timo ; Steinhäußer, Frank ; Matovic, Jovan ; Schmid, Ulrich Platinated ultrathin films made of carbon nanotubesArtikel Article2012
35Stifter, Michael ; Keplinger, Franz ; Steiner, Harald ; Hortschitz, Wilfried ; Sauter, Thilo Principles of nonlinear MEMS-resonators regarding magnetic-field detection and the interaction with a capacitive read-out-systemArtikel Article 2013
36Mayrhofer, P. M. ; Persson, P. O. Å. ; Bittner, A. ; Schmid, U. Properties of ScxAl1‑xN (x = 0.27) thin films on sapphire and silicon substrates upon high temperature loadingArtikel Article 2016
37Oliver, M. J. ; Hernando-García, J. ; Ababneh, A. ; Seidel, H. ; Schmid, U. ; Andrés, J. P. ; Pobedinskas, P. ; Haenen, K. ; Sánchez-Rojas, J. L. Resonantly excited AlN-based microcantilevers for immunosensingArtikel Article2012
38Bolzmacher, Christian ; Bauer, Karin ; Schmid, Ulrich ; Hafez, Moustapha ; Seidel, Helmut Robust miniaturized amplification unit for piezoelectric actuators: comparison of single crystal silicon and superelastic nickel titanium as membrane materialsArtikel Article2010
39Kiziroglou, M. E. ; Elefsiniotis, A. ; Kokorakis, N. ; Wright, S. W. ; Toh, T. T. ; Mitcheson, P. D. ; Schmid, U. ; Becker, Th. ; Yeatman, E. M. Scaling and super‑cooling in heat storage harvesting devicesArtikel Article 2016
40Cerimovic, Samir ; Beigelbeck, Roman ; Antlinger, Hannes ; Schalko, Johannes ; Jakoby, Bernhard ; Keplinger, Franz Sensing viscosity and density of glycerol-water mixtures utilizing a suspended plate MEMS resonatorArtikel Article 2012