Mikrosystemtechnik Projektkonto Schmid

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Project Title (de) Projekttitel (de)
Mikrosystemtechnik Projektkonto Schmid
 

Publications

Results 1-20 of 29 (Search time: 0.003 seconds).

PreviewAuthors / EditorsTitleTypeIssue Date
1Mayrhofer, P.M. ; Euchner, H. ; Bittner, A. ; Schmid, U. Circular test structure for the determination of piezoelectric constants of ScxAl1−xN thin films applying Laser Doppler Vibrometry and FEM simulationsArtikel Article 2015
2Mayrhofer, P.M. ; Euchner, H. ; Bittner, A. ; Schmid, U. Circular Patterned Test Structures for Precise Determination of Piezoelectric Thin Film Constants: Application to ScxAl1-xNKonferenzbeitrag Inproceedings 2014
3Bittner, A. ; Prewein, F. ; Schmid, U. Impact of Patterning Technique on the Long Term Stability of Ag Thin FilmsKonferenzbeitrag Inproceedings 2014
4Schmid, P. ; Zarfl, C. ; Balogh, G. ; Schmid, U. Gauge Factor of Titanium/Platinum Thin Films up to 350°CKonferenzbeitrag Inproceedings 2014
5Schneider, M. ; Bittner, A. ; Schmid, P. ; Schmid, U. Impact of C-axis Orientation of Aluminium Nitride Thin Films on the Long-term Stability and Mechanical Properties of Resonantly Excited MEMS CantileversKonferenzbeitrag Inproceedings 2014
6Reitterer, J. ; Fidler, F. ; Schmid, G. ; Riel, T. ; Hambeck, C. ; Julien-Wallsee, F. Saint ; Leeb, W. ; Schmid, U. Laser Light Module with Integrated MEMS Mirror for Autostereoscopic Outdoor DisplaysKonferenzbeitrag Inproceedings 2014
7Ruiz-Díez, V. ; Hernando-Garcia, J. ; Kucera, Martin ; Ababneh, A. ; Schmid, Ulrich ; Seidel, Helmut ; Sànchez-Rojas, Jose Luis Modelling Of Out-Of-Plane And In-Plane Modes Of Microplates In Liquid MediaKonferenzbeitrag Inproceedings2014
8Manzaneque, Tomas ; Ruiz-Diez, Victor ; Hernando-Garcia, Jorge ; Wistrela, Elisabeth ; Kucera, Martin ; Schmid, Ulrich ; Luis Sanchez-Rojas, Jose Density-viscosity sensor based on piezoelectric MEMS resonator and oscillator circuitKonferenzbeitrag Inproceedings2014
9Stöber, Laura ; Konrath, J.P. ; Schneider, Michael ; Schmid, Ulrich Usability of Molybdenum and Molybdenum Nitride Thin Films for Microsystem ApplicationsKonferenzbeitrag Inproceedings2014
10Dergez, David ; Bittner, Achim ; Schalko, Johannes ; Schmid, Ulrich Low-stress and Long-term Stable a-SiNx:H Films Deposited by ICP-PECVDKonferenzbeitrag Inproceedings 2014
11Zarfl, C. ; Schmid, P. ; Balogh, G. ; Schmid, U. TiAlN Thin Films as High Temperature Strain GaugesKonferenzbeitrag Inproceedings 2014
12Manzaneque, Tomás ; Ruiz-Díez, Víctor ; Hernando-García, Jorge ; Wistrela, Elisabeth ; Kucera, Martin ; Schmid, Ulrich ; Sánchez-Rojas, José Luis Piezoelectric MEMS resonator-based oscillator for density and viscosity sensingArtikel Article2014
13Wang, Wenbo ; Mayrhofer, Patrick ; He, Xingli ; Bittner, Achim ; Schmid, Ulrich ; Luo, J.K. High performance AlScN thin film based surface acoustic wave devices with large electromechanical coupling coefficientArtikel Article2014
14Schneider, M. ; Bittner, A. ; Schmid, U. Thickness dependence of Young's modulus and residual stress of sputtered aluminum nitride thin filmsArtikel Article2014
15Bohnenberger, Timo ; Schmid, Ulrich Layer-by-layer approach for deposition of pure carbon nanotubes and composite films for use as electrodes in electrochemical devicesArtikel Article2014
16Steinhäußer, Frank ; Talai, Armin ; Steiger-Thirsfeld, Andreas ; Koelpin, Alexander ; Weigel, Robert ; Bittner, Achim ; Schmid, Ulrich Graphical based characterisation and modelling of material gradients in porosified LTCCArtikel Article2014
17Bohnenberger, Timo ; Rafailovic, Lidija D. ; Weilach, Christian ; Hubmayr, David ; Schmid, Ulrich Thin films from functionalized carbon nanotubes using the layer-by-layer techniqueArtikel Article2014
18Thangaraj, K. ; Elefsiniotis, A. ; Becker, Thomas ; Schmid, Ulrich ; Lees, J. ; Featherston, C. A. ; Pullin, R. Energy storage options for wireless sensors powered by aircraft specific thermoelectric energy harvesterArtikel Article2014
19Kucera, M. ; Hofbauer, F. ; Wistrela, E. ; Manzaneque, T. ; Ruiz-Díez, V. ; Sánchez-Rojas, J. L. ; Bittner, A. ; Schmid, U. Lock‑in amplifier powered analogue Q‑control circuit for self‑actuated self‑sensing piezoelectric MEMS resonatorsArtikel Article2014
20Schneider, Michael ; Bittner, Achim ; Schmid, Ulrich Temperature dependant dielectric breakdown of sputter‑deposited AlN thin films using a time‑zero approachArtikel Article2014