Mikrosystemtechnik Projektkonto Schmid


Project Title (de) Projekttitel (de)
Mikrosystemtechnik Projektkonto Schmid
 

Publications

Results 1-20 of 29 (Search time: 0.004 seconds).

PreviewAuthor(s)TitleTypeIssue Date
1Mayrhofer, P.M. ; Euchner, H. ; Bittner, A. ; Schmid, U. Circular test structure for the determination of piezoelectric constants of ScxAl1−xN thin films applying Laser Doppler Vibrometry and FEM simulationsArtikel Article 2015
2Wang, Wenbo ; Mayrhofer, Patrick ; He, Xingli ; Gillinger, Manuel ; Ye, Zhi ; Wang, Xiaozhi ; Bittner, Achim ; Schmid, Ulrich ; Luo, J. K. High performance AlScN thin film based surface acoustic wave devices with large electromechanical coupling coefficientArtikel Article 2014
3Bohnenberger, Timo ; Rafailovic, Lidija D. ; Weilach, Christian ; Hubmayr, David ; Schmid, Ulrich Thin films from functionalized carbon nanotubes using the layer-by-layer techniqueArtikel Article 2014
4Thangaraj, K. ; Elefsiniots, A. ; Becker, Thomas ; Schmid, Ulrich ; Lees, J. ; Featherston, C. A. ; Pullin, R. Energy storage options for wireless sensors powered by aircraft specific thermoelectric energy harvesterArtikel Article 2014
5Steinhäußer, Frank ; Talai, Armin ; Steiger-Thirsfeld, Andreas ; Koelpin, Alexander ; Weigel, Robert ; Bittner, Achim ; Schmid, Ulrich Graphical based characterisation and modelling of material gradients in porosified LTCCArtikel Article 2014
6Alamin Dow, Ali B. ; Schmid, Ulrich ; Kherani, Nazir P. Unimorph and bimorph piezoelectric energy harvester stimulated by β-emitting radioisotopes: a modeling studyArtikel Article 2014
7Bohnenberger, Timo ; Schmid, Ulrich Layer-by-layer approach for deposition of pure carbon nanotubes and composite films for use as electrodes in electrochemical devicesArtikel Article 2014
8Manzaneque, Tomás ; Ruiz-Díez, Víctor ; Hernando-García, Jorge ; Wistrela, Elisabeth ; Kucera, Martin ; Schmid, Ulrich ; Sánchez-Rojas, José Luis Piezoelectric MEMS resonator-based oscillator for density and viscosity sensingArtikel Article 2014
9Schneider, M. ; Bittner, A. ; Schmid, U. Thickness dependence of Young's modulus and residual stress of sputtered aluminum nitride thin filmsArtikel Article 2014
10Fricke, S ; Friedberger, A ; Seidel, H ; Schmid, U High temperature measurement set-up for the electro-mechanical characterization of robust thin film systemsArtikel Article 2014
11Elefsiniotis, A. ; Kokorakis, N. ; Becker, T. ; Schmid, U. A thermoelectric-based energy harvesting module with extended operational temperature range for powering autonomous wireless sensor nodes in aircraftArtikel Article 2014
12Backes, A. ; Schmid, U. Impact of doping level on the metal assisted chemical etching of p-type siliconArtikel Article 2014
13Elefsiniotis, A. ; Becker, Th. ; Schmid, U. Thermoelectric Energy Harvesting Using Phase Change Materials (PCMs) in High Temperature Environments in AircraftArtikel Article 2014
14Alamin Dow, Ali B. ; Bittner, Achim ; Schmid, Ulrich ; Kherani, Nazir P. Design, fabrication and testing of a piezoelectric energy microgeneratorArtikel Article 2014
15Schneider, Michael ; Bittner, Achim ; Schmid, Ulrich Temperature dependant dielectric breakdown of sputter‑deposited AlN thin films using a time‑zero approachArtikel Article 2014
16Ababneh, Abdallah ; Al-Omari, A. N. ; Dagamseh, A. M. K. ; Qiu, H. C. ; Feili, D. ; Ruiz-Díez, V. ; Manzaneque, T. ; Hernando, J. ; Sánchez-Rojas, J. L. ; Bittner, A. ; Schmid, U. ; Seidel, H. Electrical characterization of micromachined AlN resonators at various back pressuresArtikel Article 2014
17Manzaneque, Tomás ; Ruiz-Díez, V. ; Hernando-García, J. ; Ababneh, A. ; Al-Omari, A. N. ; Kucera, M. ; Bittner, A. ; Schmid, U. ; Seidel, H. ; Sánchez-Rojas, J. L. Piezoelectric in‑plane microplate resonators based on contour and flexure‑actuated modesArtikel Article 2014
18Kucera, M. ; Hofbauer, F. ; Wistrela, E. ; Manzaneque, T. ; Ruiz-Díez, V. ; Sánchez-Rojas, J. L. ; Bittner, A. ; Schmid, U. Lock‑in amplifier powered analogue Q‑control circuit for self‑actuated self‑sensing piezoelectric MEMS resonatorsArtikel Article 2014
19Dergez, David ; Bittner, Achim ; Schalko, Johannes ; Schmid, Ulrich Low-stress and Long-term Stable a-SiNx:H Films Deposited by ICP-PECVDKonferenzbeitrag Inproceedings 2014
20Mayrhofer, P.M. ; Euchner, H. ; Bittner, A. ; Schmid, U. Circular Patterned Test Structures for Precise Determination of Piezoelectric Thin Film Constants: Application to ScxAl1-xNKonferenzbeitrag Inproceedings 2014