Giubertoni, D.

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Giubertoni, D.
 

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PreviewAuthor(s)TitleTypeIssue Date
1Ingerle, D. ; Meirer, F. ; Pepponi, G. ; Demenev, E. ; Giubertoni, D. ; Wobrauschek, P. ; Streli, C. Combined evaluation of grazing incidence X-ray fluorescence and X-ray reflectivity data for improved profiling of ultra-shallow depth distributionsArtikel Article 2014
2Ingerle, D. ; Pepponi, Giancarlo ; Meirer, F. ; Schiebl, M. ; Giubertoni, D. ; Demenev, E. ; Wobrauschek, Peter ; Streli, Christina New approach for characterization of ultra-shallow implants by simultaneous evaluation of GIXRF and XRRPräsentation Presentation2014
3Ingerle, D. ; Pepponi, Giancarlo ; Meirer, F. ; Giubertoni, D. ; Demenev, E. ; Wobrauschek, Peter ; Streli, Christina New approach for characterization of ultra-shallow implants by simultaneous evaluation of GIXRF and XRRPräsentation Presentation2013
4Pepponi, Giancarlo ; Meirer, F. ; Brigidi, Fabio ; Demenev, E. ; Giubertoni, D. ; Gennaro, S. ; Bersani, M. ; Ingerle, D. ; Streli, Christina ; Steinhauser, Georg ; Mehta, A. ; Pianetta, P. ; Vishwanath, V. ; Foad, M.A. GIXRF and GEXRF analysis of PIII ultra shallow arsenic profiles in SiliconPräsentation Presentation2013
5Meirer, F. ; Demenev, E. ; Giubertoni, D. ; Gennaro, S. ; Vanzetti, L. ; Pepponi, G. ; Bersani, M. ; Sahiner, M. A. ; Steinhauser, G. ; Foad, M. A. ; Woicik, J. C. ; Mehta, A. ; Pianetta, P. Formation Of Arsenic Rich Silicon Oxide Under Plasma Immersion Ion Implantation And Laser AnnealingArtikel Article2012
6Ingerle, D. ; Pepponi, Giancarlo ; Meirer, F. ; Demenev, E. ; Giubertoni, D. ; Streli, Christina Modelling shallow dopant distributions as layered samples for grazing incidence x-ray fluorescence analysisPräsentation Presentation2012
7Meirer, F. ; Pepponi, Giancarlo ; Ingerle, D. ; Sahiner, M.A. ; Giubertoni, D. ; Demenev, E. ; Foad, M.A. ; Woicik, J.C. ; Mehta, A. ; Streli, Christina ; Pianetta, P. Characterization of ultra shallow arsenic implants in silicon using grazing incidence and grazing exit x-ray spectroscopyPräsentation Presentation2011
8Pepponi, Giancarlo ; Meirer, F. ; Sahiner, M.A. ; Giubertoni, D. ; Gennaro, S. ; Demenev, E. ; Woicik, J.C. ; Bersani, M. ; Foad, M.A. ; Streli, Christina ; Pianetta, P. GI-EXAFS of Arsenic ultra shallow junctions in Silicon formed by beamline and plasma immersion ion implantation and laser annealingPräsentation Presentation2010
9Pepponi, Giancarlo ; Giubertoni, D. ; Bersani, M. ; Meirer, F. ; Streli, Christina Grazing Incidence X-Ray Fluorescence Analysis and X-ray Absorption applied to the characterisation of As shallow implants in SiPräsentation Presentation2010
10Pepponi, Giancarlo ; Meirer, F. ; Sahiner, M.A. ; Giubertoni, D. ; Gennaro, S. ; Demenev, E. ; Bersani, M. ; Foad, M.A. ; Streli, Christina ; Pianetta, P. Grazing Incidence X-Ray Absorption Applied To The Characterisation Of As Shallow Implants In SiPräsentation Presentation2010
11Giubertoni, D. ; Pepponi, Giancarlo ; Sahiner, M.A. ; Kelty, S.P. ; Gennaro, S. ; Bersani, M. ; Kah, M. ; Kirkby, K.J. ; Doherty, R. ; Foad, M.A. ; Meirer, F. ; Streli, Christina ; Woicik, J.C. ; Pianetta, P. Deactivation of submelt laser annealed arsenic ultrashallow junctions in silicon during subsequent thermal treatmentArtikel Article 2010
12Ingerle, D. ; Meirer, F. ; Zoeger, N. ; Pepponi, G. ; Giubertoni, D. ; Steinhauser, G. ; Wobrauschek, P. ; Streli, C. A new spectrometer for grazing incidence X-ray fluorescence for the characterization of Arsenic implants and Hf based high-k layersArtikel Article 2010
13Pepponi, Giancarlo ; Giubertoni, D. ; Bersani, M. ; Meirer, F. ; Ingerle, D. ; Steinhauser, Georg ; Streli, Christina ; Hoenicke, P. ; Beckhoff, B. Grazing incidence x-ray fluorescence and secondary ion mass spectrometry combined approach for the characterization of ultrashallow arsenic distribution in siliconArtikel Article 2010
14Ingerle, D. ; Meirer, F. ; Zöger, N. ; Pepponi, Giancarlo ; Giubertoni, D. ; Wobrauschek, Peter ; Streli, Christina Spectrometer for Grazing Incidence XRF: Characterization of As Implants and Hf LayerPräsentation Presentation2009
15Meirer, F. ; Pepponi, Giancarlo ; Streli, Christina ; Giubertoni, D. ; Wobrauschek, Peter ; Pianetta, P. Recent research about GI-XASPräsentation Presentation2009
16Ingerle, D. ; Zöger, N. ; Wobrauschek, Peter ; Streli, Christina ; Meirer, F. ; Pepponi, Giancarlo ; Giubertoni, D. Spectrometer For Grazing Incidence Xrf: Characterization Of As Implants And Hf LayersPräsentation Presentation2009
17Meirer, F. ; Streli, Christina ; Wobrauschek, Peter ; Pepponi, Giancarlo ; Giubertoni, D. ; Pianetta, P. Txrf-Xanes And Gi-Xas: X-Ray Absorption Spectroscopy In Trace AnalysisPräsentation Presentation2009
18Ingerle, D. ; Meirer, F. ; Zöger, N. ; Pepponi, Giancarlo ; Giubertoni, D. ; Wobrauschek, Peter ; Streli, Christina A GIXRF laboratory insrument for the characterization of ultra shallow implants and thin filmsPräsentation Presentation2009
19Giubertoni, D. ; Pepponi, Giancarlo ; Sahiner, M.A. ; Kelty, S.P. ; Kah, M. ; Kirkby, K.J. ; Meirer, F. ; Gennaro, S. ; Doherty, R. ; Foad, M.A. ; Woicik, J.C. ; Streli, Christina ; Bersani, M. ; Pianetta, P. Deactivation of sub-melt laser annealed arsenic ultra shallow junctions in silicon during subsequent thermal treatmentPräsentation Presentation2009
20Giubertoni, D. ; Pepponi, Giancarlo ; Beckhoff, B. ; Hoenicke, P. ; Gennaro, S. ; Meirer, F. ; Ingerle, D. ; Steinhauser, Georg ; Fried, M. ; Petrik, P. ; Parisini, A. ; Reading, M.A. ; Streli, Christina ; van den Berg, J.A. ; Bersani, M. Multi-technique characterization of arsenic ultra shallow junctions in silicon within the ANNA consortiumPräsentation Presentation2009