Title: Oxidation - and oxygen diffusion - behaviour in hafnium based thin films analysed with a ToF-SIMS
Other Titles: Untersuchung der Oxidation von Hafnium bassierenden dünnen Schichten mit TOF-SIMS
Language: English
Authors: Haager, Lena 
Qualification level: Diploma
Advisor: Hutter, Herbert 
Issue Date: 2020
Number of Pages: 73
Qualification level: Diploma
Keywords: Hafnium; Dünne Schichten 7 SIMS
Hafnium; thin layers; SIMS
URI: https://resolver.obvsg.at/urn:nbn:at:at-ubtuw:1-136956
Library ID: AC15635991
Organisation: E164 - Institut für Chemische Technologien und Analytik 
Publication Type: Thesis
Appears in Collections:Thesis

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