Iro, M., Ingerle, D., & Streli, C. (2022, June 28). jGiXa 2.0 and further advances in GIXA Software [Poster Presentation]. EXRS 2022 - European X-ray Spectrometry Conference, Brügge, Belgium.
EXRS 2022 - European X-ray Spectrometry Conference
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Event date:
26-Jun-2022 - 1-Jul-2022
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Event place:
Brügge, Belgium
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Keywords:
GIXRF; Nanolayer characterization
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Abstract:
Combining the analysis of Grazing Incidence X-Ray fluorescence (GIXRF), which is a method closely related to Total reflexion X-ray fluorescence (TXRF), measurements and X-ray reflectometry (XRR) measurements allows the investigation of materials with features in the nanometer range. The data of these combined measurement techniques (GIXA) can be acquired by simultaneous measurements in one setup, with a detector collecting fluorescence radiation in the TXRF geometry and a detector collecting the reflected radiation, or separately, with two measurements in two different setups. The analysis of the acquired measurement data can be performed simultaneously. jGiXa optimizes sample specific parameters by fitting simulated results for angle dependent XRF- and XRR-intensities to the measured data. jGiXa has been updated to work as a java standalone software package with an easy-to-use graphical user interface (GUI). Also the ability to calculate transition layers, which can be used to model diffusion effects, in the sample model has been added. Furthermore, a number of useful tools for the evaluation of GIXA measurements have been implemented and are free to use on the website gixa.ati.tuwien.ac.at. The available online-tools offer possibilities to: • Calculate and plot the penetration depth for Radiation of a specific Energy entering a given material of a given density under a given angle of incidence • Calculate the refractive index n = 1-δ- iβ and plot δ and β for a given material, with a given density in a specific energy range • Calculate and plot the atomic scattering factors f1 and f2 of a given material in a specific energy range • Calculate and plot the angle dependent XRF- and XRR-intensities using a number of user specified input data describing setup and sample for a single- and a bi-layer.he text of your abstract should be entered here.