Record link: 
http://hdl.handle.net/20.500.12708/139601
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Title: 
Fabrication and evaluation of different passivation layers for the Ge-Insulator interface using Plasma-Enhanced ALD
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Citation: 
Nazzari, D., Solfronk, O., Mustajbasic Melisa, Sistani, M., & Weber, W. M. (2022, September 0). Fabrication and evaluation of different passivation layers for the Ge-Insulator interface using Plasma-Enhanced ALD [Conference Presentation]. European Material Research Society (E-MRS) Fall Meeting 2022, Warsaw, Poland.
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Publication Type: 
Presentation - Conference Presentation
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Language: 
English
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Authors: 
Nazzari, Daniele 
Solfronk, Oliver 
Mustajbasic Melisa 
Sistani, Masiar 
Weber, Walter Michael 
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Organisational Unit: 
E362-02 - Forschungsbereich Nanoelektronische Bauelemente 
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Date (published): 
Sep-2022
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Event name: 
European Material Research Society (E-MRS) Fall Meeting 2022 
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Event date: 
19-Sep-2022 - 22-Sep-2022
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Event place: 
Warsaw, Poland
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Keywords: 
germanium; ALD; interface
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Research Areas: 
Materials Characterization: 50%
Surfaces and Interfaces: 50%
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Science Branch: 
2020 - Elektrotechnik, Elektronik, Informationstechnik: 100%
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