Record link: 
http://hdl.handle.net/20.500.12708/139605
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Title: 
Interface engineering of Ge nanosheets: evaluation of different high-k materials for improving device performances
en
Citation: 
Nazzari, D., Sistani, M., Behrle, R., Wind, L., Lugstein, A., & Weber, W. M. (2022, September 13). Interface engineering of Ge nanosheets: evaluation of different high-k materials for improving device performances [Conference Presentation]. High k Workshop 2022, Dresden, Germany.
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Publication Type: 
Presentation - Conference Presentation
en
Language: 
English
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Authors: 
Nazzari, Daniele 
Sistani, Masiar 
Behrle, Raphael 
Wind, Lukas 
Lugstein, Alois 
Weber, Walter Michael 
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Organisational Unit: 
E362-02 - Forschungsbereich Nanoelektronische Bauelemente 
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Date (published): 
13-Sep-2022
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Event name: 
High k Workshop 2022 
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Event date: 
12-Sep-2022 - 13-Sep-2022
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Event place: 
Dresden, Germany
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Keywords: 
germanium; nanosheets; interface engineering; high-k
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Research Areas: 
Materials Characterization: 50%
Surfaces and Interfaces: 50%
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Science Branch: 
2020 - Elektrotechnik, Elektronik, Informationstechnik: 100%
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