Record link: 
http://hdl.handle.net/20.500.12708/145742
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Title: 
A Cellular Automaton Based Interpretation of Metal Assisted Photochemical Porosification of 4H-Silicon Carbide
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Citation: 
Leitgeb, M., Zellner, C., Lukschanderl, M., Schneider, M., & Schmid, U. (2018). A Cellular Automaton Based Interpretation of Metal Assisted Photochemical Porosification of 4H-Silicon Carbide. Journal of The Electrochemical Society, 165(9), E325–E329. https://doi.org/10.1149/2.0571809jes
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Publisher DOI: 
10.1149/2.0571809jes
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Publication Type: 
Article - Original Research Article
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Language: 
English
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Authors: 
Leitgeb, Markus 
Zellner, Christopher 
Lukschanderl, Markus 
Schneider, Michael 
Schmid, Ulrich 
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Organisational Unit: 
E366-02 - Forschungsbereich Mikrosystemtechnik 
E366-01 - Forschungsbereich Mikro- und Nanosensorik 
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Journal: 
Journal of The Electrochemical Society 
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ISSN: 
0013-4651
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Date (published): 
2018
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Number of Pages: 
5
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Peer reviewed: 
Yes
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Keywords: 
Condensed Matter Physics; Electronic, Optical and Magnetic Materials; Renewable Energy, Sustainability and the Environment; Surfaces, Coatings and Films; Materials Chemistry; Electrochemistry
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Abstract: 
In this paper the pore formation process during metal assisted photochemical etching (MAPCE) of 4H silicon carbide (SiC) is investigated. By utilizing cellular automaton simulations, it was found, that MAPCE can be described by time-stochastic effects as long as the etching rate is constant. When this is not the case, other effects such as the growth of already existing pores dominate, and the probability of new pore formation decreases. These findings implied that porous SiC generated with MAPCE can most beneficially be used as anti- reflective coating or as integrated filter element in optical sensor applications.
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Research Areas: 
Materials Characterization: 20%
Special and Engineering Materials: 35%
Sensor Systems: 45%
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Science Branch: 
Elektrotechnik, Elektronik, Informationstechnik
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