Record link: 
http://hdl.handle.net/20.500.12708/147406
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Title: 
A review of the most important failure, reliability and nonlinearity aspects in the development of microelectromechanical systems (MEMS)
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Citation: 
Rafiee, P., Khatibi, G., & Zehetbauer, M. (2017). A review of the most important failure, reliability and nonlinearity aspects in the development of microelectromechanical systems (MEMS). Microelectronics International, 34(1), 9–21. https://doi.org/10.1108/mi-03-2015-0026
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Publisher DOI: 
10.1108/mi-03-2015-0026
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Publication Type: 
Article - Original Research Article
en
Language: 
English
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Authors: 
Rafiee, Peyman 
Khatibi, Golta 
Zehetbauer, Michael 
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Organisational Unit: 
E164 - Institut für Chemische Technologien und Analytik 
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Journal: 
Microelectronics International 
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ISSN: 
1356-5362
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Date (published): 
3-Jan-2017
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Number of Pages: 
13
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Peer reviewed: 
Yes
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Keywords: 
Electrical and Electronic Engineering; Condensed Matter Physics; Electronic, Optical and Magnetic Materials; Atomic and Molecular Physics, and Optics; Surfaces, Coatings and Films
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Research Areas: 
Special and Engineering Materials: 50%
Structure-Property Relationship: 50%
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Science Branch: 
Chemie
Physik, Astronomie
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Appears in Collections:
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