Rafiee, P., Khatibi, G., & Zehetbauer, M. (2017). A review of the most important failure, reliability and nonlinearity aspects in the development of microelectromechanical systems (MEMS). Microelectronics International, 34(1), 9–21. https://doi.org/10.1108/mi-03-2015-0026
E164 - Institut für Chemische Technologien und Analytik
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Journal:
Microelectronics International
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ISSN:
1356-5362
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Date (published):
3-Jan-2017
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Number of Pages:
13
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Peer reviewed:
Yes
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Keywords:
Electrical and Electronic Engineering; Condensed Matter Physics; Electronic, Optical and Magnetic Materials; Atomic and Molecular Physics, and Optics; Surfaces, Coatings and Films
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Research Areas:
Special and Engineering Materials: 50% Structure-Property Relationship: 50%
