Record link: 
http://hdl.handle.net/20.500.12708/148676
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Title: 
Impact of layer and substrate properties on the surface acoustic wave velocity in scandium doped aluminum nitride based SAW devices on sapphire
en
Citation: 
Gillinger, M., Shaposhnikov, K., Knobloch, T., Schneider, M., Kaltenbacher, M., & Schmid, U. (2016). Impact of layer and substrate properties on the surface acoustic wave velocity in scandium doped aluminum nitride based SAW devices on sapphire. Applied Physics Letters, 108(23), Article 231601. https://doi.org/10.1063/1.4953259
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Publisher DOI: 
10.1063/1.4953259
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Publication Type: 
Artikel - Original Research Article
de
 
Article - Original Research Article
en
Language: 
English
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Authors: 
Gillinger, Manuel 
Shaposhnikov, Kirill 
Knobloch, Tobias 
Schneider, Michael 
Kaltenbacher, Manfred 
Schmid, Ulrich 
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Organisational Unit: 
E366-02 - Forschungsbereich Mikrosystemtechnik 
E325-03 - Forschungsbereich Messtechnik und Aktorik 
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Journal: 
Applied Physics Letters 
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ISSN: 
0003-6951
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Date (published): 
2016
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Number of Pages: 
4
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Publisher: 
AIP PUBLISHING
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Peer reviewed: 
Yes
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Keywords: 
Physics and Astronomy (miscellaneous)
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Research Areas: 
Modelling and Simulation: 100%
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Science Branch: 
Maschinenbau
Andere Naturwissenschaften
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