Loch Gesing, A., Platz, D., & Schmid, U. (2022). Modeling Non-conventional Vibrational Modes of Micro-plates in Viscous Fluids [Conference Presentation]. ENOC 2020 - 10th European Nonlinear Dynamics Conference, Lyon, France.
Micro-plates exhibit extraordinarily low losses in viscous fluids when vibrating in the non-conventional roof tile-shaped
modes. However roof tile-shaped modes are commonly not considered for micro-sensors due to the lack of methods to predict these
modes’ dynamic response in viscous fluids. We developed a numerical method to calculate the spectral displacement of micro-plates
oscillating in viscous fluids with which we can predict both conventional and non-conventional vibrational modes. The method is based
on the Kirchhoff-Love plate equation, which we solve with a continuous-discontinuous approach to the Galerkin Method, with the
method of fundamental solutions for the linearized Navier-Stokes equations. We show-case our method with the analysis of a silicon
micro-plate immersed in water. With the spectral displacement curve it is straight forward to categorize peaks correspondent to beam
bending modes, torsional modes and roof tile-shaped modes. Furthermore, we calculate the fluid flow field associated to each vibrating
mode of the micro-plate. Our method thus provides a crucial understanding of the flow field around an oscillating micro-plate, which
may enable novel device architectures for resonantly operated micro-sensors in viscous fluids.