Record link: 
http://hdl.handle.net/20.500.12708/159193
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Title: 
Technology and process integration of nanoscale electronic and sensor devices
en
Citation: 
Lugstein, A. (2012). Technology and process integration of nanoscale electronic and sensor devices [Professorial Dissertation, Technische Universität Wien]. reposiTUm. http://hdl.handle.net/20.500.12708/159193
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CatalogPlus: 
AC11010707
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Publication Type: 
Thesis - Habilitationsschrift
en
Language: 
English
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Authors: 
Lugstein, Alois 
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Date (published): 
2012
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Keywords: 
Nanoelektronik; Sensor; Bauelement; Integration; Aufsatzsammlung
de
Additional information: 
Enth Originalbeitr. u. 13 Veröffentl.
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Appears in Collections:
Thesis

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