Record link: 
http://hdl.handle.net/20.500.12708/159376
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Title: 
3D Micro- & nanotechnology for microelectronics and beyond : research contributions to materials, processes and devices for 2D and 3D nanosystem architectures
en
Citation: 
Wanzenböck, H. (2017). 3D Micro- & nanotechnology for microelectronics and beyond : research contributions to materials, processes and devices for 2D and 3D nanosystem architectures [Professorial Dissertation, Technische Universität Wien]. reposiTUm. http://hdl.handle.net/20.500.12708/159376
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CatalogPlus: 
AC13778698
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Publication Type: 
Thesis - Habilitationsschrift
en
Language: 
English
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Authors: 
Wanzenböck, Heinz
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Date (published): 
2017
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Number of Pages: 
423
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Keywords: 
Mikroelektronik; Mikrosystemtechnik; Nanotechnologie; Dimension 3
de
Additional information: 
Zusammenfassung in deutscher Sprache
Enthält Originalbeitrag
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Appears in Collections:
Thesis

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