Record link: 
http://hdl.handle.net/20.500.12708/168608
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Title: 
New materials for micro-scale sensors and actuators
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Citation: 
Wilson, S. A., Jourdain, R. P. J., Zhang, Q., Dorey, R. A., Bowen, C. R., Willander, M., Wahab, Q. U., Willander, M., Al-hilli, S. M., Nur, O., Quandt, E., Johansson, C., Pagounis, E., Kohl, M., Matovic, J., Samel, B., van der Wijngaart, W., Jager, E. W. H., Carlsson, D., … Persson, K. (2007). New materials for micro-scale sensors and actuators. Materials Science and Engineering: R: Reports, 56(1–6), 1–129. https://doi.org/10.1016/j.mser.2007.03.001
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Publisher DOI: 
10.1016/j.mser.2007.03.001
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Publication Type: 
Article - Review Article
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Language: 
English
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Authors: 
Wilson, Stephen A. 
Jourdain, Renaud P.J. 
Zhang, Qi 
Dorey, Robert A. 
Bowen, Chris R. 
Willander, Magnus 
Wahab, Qamar Ul 
Willander, Magnus 
Al-hilli, Safaa M. 
Nur, Omer 
Quandt, Eckhard 
Johansson, Christer 
Pagounis, Emmanouel 
Kohl, Manfred 
Matovic, Jovan 
Samel, Björn 
van der Wijngaart, Wouter 
Jager, Edwin W.H. 
Carlsson, Daniel 
Djinovic, Zoran 
Wegener, Michael 
Moldovan, Carmen 
Iosub, Rodica 
Abad, Estefania 
Wendlandt, M. 
Rusu, Cristina 
Persson, Katrin 
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Organisational Unit: 
E366-02 - Forschungsbereich Mikrosystemtechnik 
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Journal: 
Materials Science and Engineering: R: Reports 
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ISSN: 
0927-796X
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Date (published): 
21-Jun-2007
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Number of Pages: 
129
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Publisher: 
ELSEVIER SCIENCE SA
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Peer reviewed: 
Yes
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Keywords: 
Mechanical Engineering; Mechanics of Materials; General Materials Science; Microstructure; Piezoelectric; Magnetic; Shape memory; Polymer; Microtechnology
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Abstract: 
This paper provides a detailed overview of developments in transducer materials technology relating to their current and future applications in micro-scale devices. Recent advances in piezoelectric, magnetostrictive and shape-memory alloy systems are discussed and emerging transducer materials such as magnetic nanoparticles, expandable micro-spheres and conductive polymers are introduced. Materials properties, transducer mechanisms and end applications are described and the potential for integration of the materials with ancillary systems components is viewed as an essential consideration. The review concludes with a short discussion of structural polymers that are extending the range of micro-fabrication techniques available to designers and production engineers beyond the limitations of silicon fabrication technology.
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Research Areas: 
Structure-Property Relationship: 15%
Special and Engineering Materials: 20%
Materials Characterization: 10%
Sustainable Production and Technologies: 10%
Sustainable and Low Emission Mobility: 10%
Sensor Systems: 35%
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Science Branch: 
Elektrotechnik, Elektronik
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