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Record link: 
http://hdl.handle.net/20.500.12708/171701
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Title: 
Mechanical characterization of membrane like microelectronic components
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Citation: 
Drzik, M., Löschner, H., Haugeneder, E., Fallmann, W., Hudek, P., Rangelow, E., Sarov, Y., Lalinsky, T., & Chlpik, J. (2006). Mechanical characterization of membrane like microelectronic components. Microelectronic Engineering, 83(4–9), 1036–1042. http://hdl.handle.net/20.500.12708/171701
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CatalogPlus: 
AC06586118
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Publication Type: 
Article - Original Research Article
en
Authors: 
Drzik, M. 
Löschner, Hans 
Haugeneder, E. 
Fallmann, Wolfgang 
Hudek, Peter 
Rangelow, E. 
Sarov, Y. 
Lalinsky, T. 
Chlpik, J. 
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Organisational Unit: 
E366-01 - Forschungsbereich Mikro- und Nanosensorik 
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Journal: 
Microelectronic Engineering 
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ISSN: 
0167-9317
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Date (published): 
2006
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Number of Pages: 
7
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Peer reviewed: 
Yes
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Science Branch: 
Elektrotechnik, Elektronik
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Appears in Collections:
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