Title: Large bias-induced piezoelectric response in the ferroelectric polymer P(VDF-TrFE) for MEMS resonators
Authors: Hafner, Jonas Alexander 
Teuschel, Marco 
Disnan, Davide 
Schneider, Michael  
Schmid, Ulrich 
Category: Original Research Article
Issue Date: 17-Jan-2021
Journal: Materials Research Letters 
ISSN: 2166-3831
Piezoelectricity in ferroelectrics arises from electrostriction biased by their spontaneous polarisation, which can be enhanced through a bias-induced polarisation. Doing so, the piezoelectric response can be tuned and significantly enhanced. In this study, the ferroelectric polymer P(VDF-TrFE) was used to electro-mechanically excite a silicon microcantilever. Using this device, we demonstrate that a bias-induced polarisation improves the piezoelectric response of P(VDF-TrFE). To distinguish between the linear piezoelectric and quadratic electrostrictive effect, lock-in measurements were performed in order to separate the characteristic frequency response of both electro-mechanical phenomena. This work shows the potential for MEMS devices having controllable actuating and sensing properties.Impact statement: The non-linear nature of the strong electrostrictive effect observed in ferroelectric polymers was used to enhance and control its piezoelectric activity by an electric field. A large and tunable piezoelectric response was verified in polymer-based MEMS resonators, proving the ability to tailor their actuating and sensing properties.
Keywords: Electrostriction; Ferroelectric polymers; Field-induced piezoelectricity; Polymer-based MEMS
DOI: 10.1080/21663831.2020.1868593
Organisation: E366 - Institut für Sensor- und Aktuatorsysteme 
License: CC BY 4.0 CC BY 4.0
Publication Type: Article
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