Record link: 
http://hdl.handle.net/20.500.12708/179690
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Title: 
Process integration for deep-submicron CMOS technology
en
Citation: 
Puchner, H. (2001). Process integration for deep-submicron CMOS technology [Professorial Dissertation, Technische Universität Wien]. reposiTUm. http://hdl.handle.net/20.500.12708/179690
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CatalogPlus: 
AC03379209
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Publication Type: 
Thesis - Habilitationsschrift
en
Language: 
English
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Authors: 
Puchner, Helmut 
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Date (published): 
2001
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Additional information: 
Enth. 12 Sonderabdr.
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Appears in Collections:
Thesis

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