Steinbach, J., Jadachowski, L., Steinboeck, A., & Kugi, A. (2023). Modeling and observer design of an inductive oven with continuous product flow. Mechatronics, 95, Article 103041. https://doi.org/10.1016/j.mechatronics.2023.103041
Extended Kalman Filter; process control; Periodic motion; state observer design; Time-varying systems
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Abstract:
A control-oriented model of an inductively heated continuous industrial wafer baking oven is derived. The periodic motion of the baking plates leads to a special structure, which can be exploited to transform the time-variant model into a time-invariant discrete-time model. Emissivities of individual baking plates are uncertain and affect the pyrometric temperature measurements. Therefore, a state observer which also estimates this influence on the measured temperature is designed. The feasibility of the proposed concept is shown by measurement results on an industrial wafer baking oven.
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Research Areas:
Mathematical and Algorithmic Foundations: 50% Modeling and Simulation: 50%
