For hexagonal structured materials, anisotropic properties are well known due to their specific lattice distortion with respect to basal and prismatic planes. In the case of magnetron sputtered transition metal diborides direction-dependent hardness was reported for WB2-z, ZrB₂, as well as for TiB₂ [1-3]. In more detail, the anisotropic behaviour of hexagonal AlB₂ structured diborides is explained by a more difficult dislocation movement due to energetically less preferred slip systems. For TiB2+z it was shown that a preferred crystal growth in 0001 direction predominates super-hardness (> 40 GPa) over any stoichiometry variations [3,4]. Furthermore, the growth orientation of TiB2+z is highly dependent on process parameters, especially the pressure, which was suggested by Neidhardt et al. [5] and experimentally confirmed in a recent publication [3]. For state-of-the art protective coatings not only a high hardness is beneficial, but also specifically low residual stress states are preferred. By varying the pressure during the growth of TiB2+x coatings, the mechanical properties have been tailored by structural adaptions throughout the film cross-section. In addition, the incorporation of metallic Ti interlayers is an interesting tool for stress management within these films. To study the progression of the stress sates as well as orientation relations throughout the film cross-section, X-ray nano-diffraction synchrotron experiments (beamline P03 at PETRA III) have been performed. Furthermore, the structure-mechanical properties were described by a broad set of characterization techniques such as SEM, Nanoindentation, or micro-mechanical testing techniques.