The characterization of layered structures from the nanometer range to the 10 µm range is of increasing importance, especially if the analytical methods are non-destructive. In the first part, Confocal micro-XRF (X-ray fluorescence analysis) is introduced by Christina Streli. This technique allows the characterization of layers in the range of some 10 µm. The principle, some experimental setups (synchrotron radiation as well as lab instruments) will be described and some showcases presented.