Record link: 
http://hdl.handle.net/20.500.12708/204121
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Title: 
5D-ToF-STIM Hyperspectral Imaging with a keV He+ Focused Ion Beam
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Citation: 
Andersen, D., Mousley, M., Tabean, S., Holeňák, R., Ntemou, E., Hobler, G., Wirtz, T., Primetzhofer, D., & Eswara, S. (2024). 5D-ToF-STIM Hyperspectral Imaging with a keV He+ Focused Ion Beam. In K. Qvortrup & K. Weede Alexander (Eds.), The 17th European Microscopy Congress (EMC 2024). https://doi.org/10.1051/bioconf/202412906006
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Publisher DOI: 
10.1051/bioconf/202412906006
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Publication Type: 
Inproceedings - Abstract Book Contribution
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Language: 
English
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Authors: 
Andersen, Dustin 
Mousley, Michael 
Tabean, Saba 
Holeňák, Radek 
Ntemou, Eleni 
Hobler, Gerhard 
Wirtz, Tom 
Primetzhofer, Daniel 
Eswara, Santhana 
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Organisational Unit: 
E362-02 - Forschungsbereich Nanoelektronische Bauelemente 
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Published in: 
The 17th European Microscopy Congress (EMC 2024) 
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Volume: 
129
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Date (published): 
2024
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Event name: 
17th European Microscopy Congress (EMC 2024) 
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Event date: 
25-Aug-2024 - 30-Aug-2024
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Event place: 
Copenhagen, Denmark
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Number of Pages: 
3
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Peer reviewed: 
Yes
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Keywords: 
time-of-flight; ion beams; energy-loss spectroscopy
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Research Areas: 
Materials Characterization: 70%
Modeling and Simulation: 30%
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Science Branch: 
2100 - Nanotechnologie: 80%
2020 - Elektrotechnik, Elektronik, Informationstechnik: 20%
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Appears in Collections:
Conference Paper

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