Record link: 
http://hdl.handle.net/20.500.12708/208947
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Title: 
A Novel Method of Creating Thin 4H-SiC Foils from 4H-SiC Substrates by Controlled Spalling
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Citation: 
Wahid, S., Leitgeb, M., Pfusterschmied, G., & Schmid, U. (2024, June). A Novel Method of Creating Thin 4H-SiC Foils from 4H-SiC Substrates by Controlled Spalling [Poster Presentation]. MESS24 - Microelectronic Systems Symposium, Wien, Austria. http://hdl.handle.net/20.500.12708/208947
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Publication Type: 
Presentation - Poster Presentation
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Language: 
English
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Authors: 
Wahid, Shan 
Leitgeb, Markus 
Pfusterschmied, Georg 
Schmid, Ulrich 
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Organisational Unit: 
E366-02 - Forschungsbereich Mikrosystemtechnik 
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Date (published): 
Jun-2024
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Event name: 
MESS24 - Microelectronic Systems Symposium 
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Event date: 
6-Jun-2024 - 7-Jun-2024
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Event place: 
Wien, Austria
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Keywords: 
4H-SiC; Foils; Substrates; Method of Creating
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Research Areas: 
Materials Characterization: 100%
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Science Branch: 
2020 - Elektrotechnik, Elektronik, Informationstechnik: 100%
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