Bammer, F., & Huemer, F. F. (2024, March 6). Inline Thickness Measurement with a Polarization Camera [Conference Presentation]. LOPEC 2024, Munich, Germany.
We present for quality control in R2R-production an inline-imaging-ellipsometer based on a polarization camera.
The polarization measurement is done with a segmented nano-grid-polarisator in front of the CMOS-sensor of the camera.
The measured polarisations are oriented at 0°, 45°, 90°, and 135°. The illumination is quasi-monocromatic, using collimated light from an LED.
The angle of incidence is fixed, typically near the Brewster-Angle of the substrate.
The system can be used for full quality control of thin layers with a thickness of up to 500nm.
The full foil width up to several meters can be imaged with 1200 points along the line to be examined in parallel with a frame rate of 24fps.
Typical problems with foil-vibrations and backside-reflection are solved via a measurement directly on a roll.
This yields a stable image of a line along the roll, with a length equal to the full width of the foil.
Due to the foil movement a complete 2D-view of the thickness-distribution can be obtained in-line and in-time.
The system was tested with different layer materials, e.g. SiO2, P3HT, PEDOT and Al2O3, all on PET-foils.
For a multi-layer production line the simple system can be easily installed after each production step,
to control every layer in-time.
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Project title:
Dünnfilmmesstechnik auf organischer Photovoltaik: 315665 (European Commission)
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Research Areas:
Photonics: 50% Sustainable Production and Technologies: 25% Efficient Utilisation of Material Resources: 25%