Datensatz Zitierlink: 
http://hdl.handle.net/20.500.12708/216126
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Titel: 
Structural Investigations of Pore Nucleation after Electrochemical Porosification of 4H-SiC for MEMS
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Zitat: 
Pfusterschmied, G., Zellner, C., Schock, D., & Schmid, U. (2025). Structural Investigations of Pore Nucleation after Electrochemical Porosification of 4H-SiC for MEMS. In SMSI 2025 : Proceedings : Proof reading version (pp. 81–82). AMA Verband für Sensorik und Messtechnik e.V. https://doi.org/10.5162/SMSI2025/B2.1
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Verlags-DOI: 
10.5162/SMSI2025/B2.1
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Publikationstyp: 
Konferenzbeitrag - Full-Paper Contribution
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Sprache: 
Englisch
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Autor_innen: 
Pfusterschmied, Georg 
Zellner, Christopher 
Schock, Dominik 
Schmid, Ulrich 
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Organisations­einheit: 
E366-02 - Forschungsbereich Mikrosystemtechnik 
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Erschienen in: 
SMSI 2025 : Proceedings : Proof reading version 
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Datum (veröffentlicht): 
Mai-2025
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Veranstaltungs­name: 
SMSI 2025 - Sensor and Measurement Science International 
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Veranstaltungs­zeitraum: 
6-Mai-2025 - 8-Mai-2025
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Veranstaltungs­ort: 
Nürnberg, Deutschland
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Umfang: 
2
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Verlag: 
AMA Verband für Sensorik und Messtechnik e.V.
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Keywords: 
SiC, electrochemical etching; electrochemical etching; nucleation layer; MEMS; resonator
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Abstract: 
The study emphasises the advantages of using electrochemical porosification to fabricate SiC-based MEMS devices, specifically focusing on improving pore nucleation control while preserving surface integrity. The results indicate that surface roughness plays a crucial role in pore nucleation, demonstrating the potential for improved MEMS device performance through carefully controlled substrate and etching conditions.
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Forschungs­schwerpunkte: 
Materials Characterization: 50%
Surfaces and Interfaces: 50%
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Wissenschafts­zweig: 
2020 - Elektrotechnik, Elektronik, Informationstechnik: 100%
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Enthalten in den Sammlungen:
Conference Paper

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