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Record link:
http://hdl.handle.net/20.500.12708/225190
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Title:
Polarization and Ellipsometry: Unlocking Superior Layer Quality
en
Citation:
Bammer, F. (2025, May 28).
Polarization and Ellipsometry: Unlocking Superior Layer Quality
[Interview]. MVPro Online. http://hdl.handle.net/20.500.12708/225190
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Publication Type:
Special Contribution - Interview
en
Language:
English
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Authors:
Bammer, Ferdinand
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Organisational Unit:
E311-02-2 - Forschungsgruppe Prozesstechnik
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Date (published):
28-May-2025
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Number of Pages:
2
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Publisher:
MVPro Online
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Keywords:
Ellipsometrie; Qualitätssicherung; Schichtdickenmessung
de
Additional information:
Link zum Beitrag: https://mvproeurope.com/polarization-and-ellipsometry-unlocking-superior-layer-quality/
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Research Areas:
Photonics: 30%
Sustainable Production and Technologies: 70%
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Science Branch:
2030 - Maschinenbau: 70%
2050 - Werkstofftechnik: 15%
2020 - Elektrotechnik, Elektronik, Informationstechnik: 15%
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Appears in Collections:
Special Contribution
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