Title: Aerosol-assisted CVD of thioether-functionalised indium aminoalkoxides
Language: English
Authors: Biegger, Felix 
Jungwirth, Felix 
Seifner, Michael Stanislaus 
Rameshan, Christoph  
Barth, Sven Christian 
Category: Original Research Article
Issue Date: 2017
Journal: Monatshefte für Chemie - Chemical Monthly 
ISSN: 0026-9247
Abstract: 
Thioether-functionalised indium aminoalcoholates have been used as single-source precursors in aerosol-assisted CVD processes. The obtained In2O3−x S x oxysulphide deposits show either a single indium sulphide phase for deposits with high sulphide content [>75% (S/(S + O)) for the t-butyl derivatives] or pronounced phase separation in indium oxide and indium sulphide for lower sulphide content [<62% (S/(S + O)) for the n-butyl derivatives]. In addition to thin films, polycrystalline 1D structures are obtained at slightly modified synthesis conditions. The materials are analysed by EDX, XRD, XPS, SEM, and TEM.
Keywords: AACVD; Oxysulphides; Indium aminoalcoholates; Thin films; Nanowires
DOI: 10.1007/s00706-017-1980-2
Library ID: AC15187489
URN: urn:nbn:at:at-ubtuw:3-4164
Organisation: E165 - Institut für Materialchemie 
Publication Type: Article
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