Record link: 
http://hdl.handle.net/20.500.12708/50810
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Title: 
Ultra-sensitive and compact on-chip gas sensor on a silicon nitride photonic integrated circuit
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Citation: 
Antonacci, G., Goyvaerts, J., Zhao, H., Baumgartner, B., Lendl, B., & Baets, R. (2020). Ultra-sensitive and compact on-chip gas sensor on a silicon nitride photonic integrated circuit. In Silicon Photonics XV. Silicon Photonics XV, San Francisco, CA, United States of America (the). SPIEdigitallibrary. https://doi.org/10.1117/12.2557047
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Publisher DOI: 
10.1117/12.2557047
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Publication Type: 
Inproceedings - Full-Paper Contribution
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Authors: 
Antonacci, Giuseppe 
Goyvaerts, Jeroen 
Zhao, Haolan 
Baumgartner, Bettina 
Lendl, Bernhard 
Baets, Roel 
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Organisational Unit: 
E164-02-1 - Forschungsgruppe Prozessanalytik 
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Published in: 
Silicon Photonics XV 
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Date (published): 
2020
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Event name: 
Silicon Photonics XV 
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Event date: 
1-Feb-2020 - 6-Feb-2020
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Event place: 
San Francisco, CA, United States of America (the)
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Number of Pages: 
6
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Publisher: 
SPIEdigitallibrary, San Francisco
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Peer reviewed: 
Yes
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Abstract: 
We demonstrate a compact on-chip gas sensor based on a SiN photonic integrated circuit providing an estimated detection limit of 0.1ppm for a variety of gas vapors, including IPA, ethanol and acetone. The sensor consists of an integrated Mach-Zehnder interferometer having one arm coated with an absorptive mesoporous layer to enhance the interaction of the gas vapors with the waveguide evanescent field. Gas detection is accomplished by monitoring the spectral shift of the output signal induced by a change in the effective refractive index of the coated waveguide. Results pave the way to novel integrated solutions for environmental safety monitoring.
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Research Areas: 
Photonics: 40%
Materials Characterization: 60%
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Science Branch: 
Chemie
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Appears in Collections:
Conference Paper

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