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Record link: 
http://hdl.handle.net/20.500.12708/72664
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Title: 
Design of Linear and Nonlinear Hybrid Optical MEMS Displacement Sensors
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Citation: 
Hortschitz, W., Kohl, F., Steiner, H., Sachse, M., Stifter, M., Schalko, J., Jachimowicz, A., & Keplinger, F. (2011). Design of Linear and Nonlinear Hybrid Optical MEMS Displacement Sensors. In Smart Sensors, Actuators, and MEMS V (p. 9). SPIE. http://hdl.handle.net/20.500.12708/72664
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Publication Type: 
Inproceedings - Full-Paper Contribution
en
Authors: 
Hortschitz, Wilfried 
Kohl, Franz 
Steiner, Harald 
Sachse, Matthias 
Stifter, Michael 
Schalko, Johannes 
Jachimowicz, Artur 
Keplinger, Franz 
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Organisational Unit: 
E366-01 - Forschungsbereich Mikro- und Nanosensorik 
E366-50 - Services des Instituts 
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Published in: 
Smart Sensors, Actuators, and MEMS V 
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Date (published): 
2011
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Event name: 
Smart Sensors, Actuators, and MEMS V 
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Event date: 
18-Apr-2011 - 20-Apr-2011
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Event place: 
Prag, EU
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Number of Pages: 
9
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Publisher: 
SPIE, Volume 8066 / Washington
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Peer reviewed: 
No
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Science Branch: 
Elektrotechnik, Elektronik
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Appears in Collections:
Conference Paper

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