This work provides an innovative concept for obtaining surface information on the microto nanoscale with a novel cantilever design for atomic force microscopy (AFM) applications. Nowadays, the static contact mode for microscopic topography imaging and force measurements has been replaced widely by so-called dynamic imaging modes such as the tapping mode. Through this it is already possible to scan real-time images of both sample topography and mechanical properties at the (sub-) nanoscale, thus covering a huge spectrum of applications. Conventionally by this technique rather simple designs of mechanical resonators known as cantilevers are used, having as consequence physical limitations which need to be exceeded when targeting novel AFM applications. Mainly, a high resonance frequency of such mechanical structures is desired, to keep both scanning velocity and image resolution on a satisfactory level. On the other hand, as a general consequence of this feature also a mostly unwanted but physically connected higher cantilever stiffness results. This can have an inestimable influence on especially soft samples, which can lead to subsequently wrong measurement interpretation. In order to circumvent this drawback, a coupling of two different mechanical microstructures with tailored properties is proposed. One of these microstructures is designed to fulfill the dynamic actuating regarding high frequency and quality factor, as the other interacts with the sample surface in a rather quasistatic manner to perform low stiffness sensing. In this thesis, it is laid high focus on both the design and realization of the microstructure serving as Resonator as well as on the substantially smaller second microstructure which has a low stiffness and which is coupled mechanically to the first component.