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Record link: 
http://hdl.handle.net/20.500.12708/89858
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Title: 
ALD grown La2O3 for Ge-based MOS-device applications
en
Citation: 
Bethge, O., Abermann, S., Henkel, C., Stöger-Pollach, M., Smoliner, J., & Bertagnolli, E. (2011). ALD grown La2O3 for Ge-based MOS-device applications. E-MRS Spring Meeting 2008, Strasbourg, France. http://hdl.handle.net/20.500.12708/89858
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Publication Type: 
Presentation - Conference Presentation
en
Language: 
English
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Authors: 
Bethge, Ole 
Abermann, Stephan 
Henkel, Christoph 
Stöger-Pollach, Michael 
Smoliner, Jürgen 
Bertagnolli, Emmerich 
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Organisational Unit: 
E362 - Institut für Festkörperelektronik 
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Date (published): 
2011
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Event name: 
E-MRS Spring Meeting 2008 
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Event date: 
26-May-2008 - 30-May-2008
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Event place: 
Strasbourg, France
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Science Branch: 
Elektrotechnik, Elektronik
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Appears in Collections:
Presentation

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