2024 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD)

	Author(s)	Title	Type	Issue Date
1	Bamer, Balazs ; Leroch, Sabine ; Hossinger, Andreas ; Filipovic, Lado	Cluster-Based Semi-Empirical Model for Dopant Activation in Silicon Carbide	Inproceedings Konferenzbeitrag	2024
2	Gull, Josef ; Filipovic, Lado ; Kosina, Hans	Electron-Electron Scattering in Non-Parabolic Transport Models	Inproceedings Konferenzbeitrag	2024
3	Filipovic, Lado ; Reiter, Tobias ; Piso, Julius ; Kostal, Roman	Equipment-Informed Machine Learning-Assisted Feature-Scale Plasma Etching Model	Inproceedings Konferenzbeitrag	2024
4	Gentles, Angus ; Dehghani, Mohammad ; Minixhofer, Rainer ; Khakbaz, Pedram ; Waldhor, Dominic ; Waltl, Michael	Modeling Next Generation Sensor Chips: Towards Predictive Band Structure Models for Quarternary III-V Semiconductor Alloys	Inproceedings Konferenzbeitrag	31-Oct-2024
5	Hu, Ziyi ; Filipovic, Lado ; Li, Junjie ; Wang, Lingfei ; Wu, Zhicheng ; Chen, Rui ; Wei, Yayi ; Li, Ling	Modeling Non-Uniformity During Two-Step Dry Etching of Si/SiGe Stacks for Gate-All-Around FETs	Inproceedings Konferenzbeitrag	2024