JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B

View Statistics Email Alert RSS Feed

Journal description

Title Titel
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
 
e-ISSN
2166-2754
 
ISSN
2166-2746
 
Publisher Herausgeber
A V S AMER INST PHYSICS
 
Publisher's Address Herausgeber Adresse
STE 1 NO 1, 2 HUNTINGTON QUADRANGLE, MELVILLE, USA, NY, 11747-4502
 
Listed in SCI Aufgelistet im SCI
 
Peer reviewed Begutachtet
 
 

Publications Publikationen

Filter:
Subject:  Materials Chemistry
Subject:  Instrumentation
Author:  Bertagnolli, E.

Results 1-6 of 6 (Search time: 0.002 seconds).

PreviewAuthor(s)TitleTypeIssue Date
1Bethge, O. ; Abermann, S. ; Henkel, C. ; Smoliner, J. ; Bertagnolli, E. ; Straif, C. J. ; Hutter, H. Atomic layer deposition temperature dependent minority carrier generation in ZrO2 /GeO2 /Ge capacitorsArtikel Article 2011
2Roediger, Peter ; Wanzenboeck, Heinz D. ; Hochleitner, Gottfried ; Bertagnolli, Emmerich Crystallinity-retaining removal of germanium by direct-write focused electron beam induced etchingArtikel Article 2011
3Waid, Simon ; Wanzenboeck, Heinz D. ; Muehlberger, Michael ; Gavagnin, Marco ; Bertagnolli, Emmerich Focused ion beam direct patterning of hardmask layersArtikel Article 2014
4Waid, Simon ; Wanzenboeck, Heinz D. ; Gavagnin, Marco ; Langegger, Ruppert ; Muehlberger, Michael ; Bertagnolli, Emmerich Focused ion beam induced Ga-contamination-An obstacle for UV-nanoimprint stamp repair?Artikel Article 2013
5Langegger, Rupert ; Lugstein, Alois ; Glaser, Markus ; Bertagnolli, Emmerich ; Steiger-Thirsfeld, Andreas High temperature focused ion beam response of graphite resulting in spontaneous nanosheet formationArtikel Article2011
6Roediger, Peter ; Mijic, Mario ; Zeiner, Clemens ; Lugstein, Alois ; Wanzenboeck, Heinz D. ; Bertagnolli, Emmerich Local, direct-write, damage-free thinning of germanium nanowiresArtikel Article 2011