Schneider, Michael

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Schneider, Michael
 
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Results 121-140 of 167 (Search time: 0.003 seconds).

PreviewAuthor(s)TitleTypeIssue Date
121Stöber, Laura ; Konrath, Jens Peter ; Haberl, Verena ; Patocka, Florian ; Schneider, Michael ; Schmid, Ulrich Nitrogen incorporation in sputter deposited molybdenum nitride thin filmsArtikel Article 2016
122Frischmuth, Tobias ; Schneider, Michael ; Maurer, Daniel ; Grille, Thomas ; Schmid, Ulrich Inductively-coupled plasma-enhanced chemical vapour deposition ofhydrogenated amorphous silicon carbide thin films for MEMSArtikel Article 2016
123Frischmuth, Tobias ; Schneider, Michael ; Bogdanović Radović, Iva ; Siketić, Zdravko ; Maurer, Daniel ; Grille, Thomas ; Schmid, Ulrich Lowtemperature deposition of a-SiC:H thin films applying a dual plasma source processArtikel Article 2016
124Leitgeb, Markus ; Zellner, Christopher ; Schneider, Michael ; Schmid, Ulrich A Combination of Metal Assisted Photochemical and Photoelectrochemical Etching for Tailored Porosification of 4H SiC SubstratesArtikel Article 2016
125Wistrela, E. ; Schneider, M. ; Bittner, A. ; Schmid, U. Impact of the substrate dependent polarity distribution in c‑axis oriented AlN thin films on the etching behaviour and the piezoelectric propertiesArtikel Article 2016
126Dergez, D. ; Schneider, M. ; Bittner, A. ; Pawlak, N. ; Schmid, U. Mechanical and electrical properties of RF magnetron sputter deposited amorphous silicon-rich silicon nitride thin filmsArtikel Article 2016
127Frischmuth, Tobias ; Schneider, Michael ; Maurer, Daniel ; Grille, Thomas ; Schmid, Ulrich High temperature annealing effects on the chemical and mechanical properties of inductively-coupled plasma-enhanced chemical vapor deposited a-SiC:H thin filmsArtikel Article 2016
128Leitgeb Markus - 2016 - Communication -- The Role of the Metal-Semiconductor...pdf.jpgLeitgeb, Markus ; Backes, Andreas ; Schneider, Michael ; Zellern, Christopher ; Schmid, Ulrich Communication — The Role of the Metal-Semiconductor Junction in Pt-Assisted Photochemical Etching of Silicon CarbideArticle Artikel 2016
129Mayrhofer, Patrick ; Rehlendt, Christopher ; Bittner, Achim ; Schneider, Michael ; Schmid, Ulrich Scandium Aluminium Nitride for MEMS ApplicationsKonferenzbeitrag Inproceedings2016
130Leitgeb, Markus ; Zellner, Christopher ; Schneider, Michael ; Schmid, Ulrich Metal assisted Chemical Etching of Monocystalline Silicon CarbideKonferenzbeitrag Inproceedings2016
131Gillinger, Manuel ; Schneider, Michael ; Bittner, Achim ; Nicolay, P. ; Schmid, Ulrich High temperature performance of sputter-deposited piezoelectric aluminum nitride thin filmsKonferenzbeitrag Inproceedings2015
132Frischmuth, Tobias ; Schneider, Michael ; Maurer, Daniel ; Grille, Thomas ; Schmid, Ulrich Impact of thermal treatment on the residual stress and Young's modulus of thin a-SiC:H membranes applying bulge testingKonferenzbeitrag Inproceedings2015
133Schneider, M ; Bittner, A ; Schmid, U Improved piezoelectric constants of sputtered aluminium nitride thin films by pre-conditioning of the silicon surfaceArtikel Article2015
134Dergez, D. ; Schneider, M. ; Bittner, A. ; Schmid, U. Mechanical and electrical properties of DC magnetron sputter deposited amorphous silicon nitride thin filmsArtikel Article2015
135Schneider, M. ; Bittner, A. ; Klein, A. ; Schmid, U. Impact of film thickness and temperature on the dielectric breakdown behavior of sputtered aluminum nitride thin filmsArtikel Article2015
136Schneider, M. ; Bittner, A. ; Schmid, U. Impact of film thickness on the temperature-activated leakagecurrent behavior of sputtered aluminum nitride thin filmsArtikel Article2015
137Stöber, L ; Konrath, J P ; Krivec, S ; Patocka, F ; Schwarz, S ; Bittner, A ; Schneider, M ; Schmid, U Impact of sputter deposition parameters on molybdenum nitride thin film propertiesArtikel Article2015
138Gillinger, M. ; Schneider, M. ; Bittner, A. ; Nicolay, P. ; Schmid, U. Impact of annealing temperature on the mechanical and electrical properties of sputtered aluminum nitride thin filmsArtikel Article2015
139Sordo, Guido ; Iannacci, J. ; Serra, Enrico ; Bonaldi, M. ; Borrielli, A. L. ; Schneider, Michael ; Schmid, Ulrich Study on the performance of tailored spring elements for piezoelectric MEMS energy harvestersKonferenzbeitrag Inproceedings2015
140Stöber, Laura ; Konrath, J.P. ; Haberl, Veronika ; Schneider, Michael ; Schmid, Ulrich High Temperature Behaviour of Sputter Deposited Molybdenum Nitride Thin FilmsKonferenzbeitrag Inproceedings2015