Schneider, Michael

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Schneider, Michael
 
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Results 61-80 of 167 (Search time: 0.003 seconds).

PreviewAuthor(s)TitleTypeIssue Date
61Schneider, Michael ; Stöber, Laura ; Konrath, Jens P. ; Patocka, Florian ; Schmid, Ulrich Argon bombardment of 4H silicon carbide substrates for tailored Schottky diode barrier heightsArtikel Article 2019
62Schmid, Ulrich ; Schneider, Michael Aluminium Nitride based Piezoelectric MEMS: From Material Aspects to Low Power DevicesKonferenzbeitrag Inproceedings2019
63Patocka F - 2019 - Position-dependent mass responsivity of silicon MEMS...pdf.jpgPatocka, F. ; Schneider, M. ; Dörr, N. ; Schneidhofer, C. ; Schmid, U. Position-dependent mass responsivity of silicon MEMS cantilevers excited in the fundamental, two-dimensional roof tile-shaped modeArticle Artikel 2019
64Gillinger, Manuel ; Knobloch, Theresia ; Markovic, A. ; Pfusterschmied, Georg ; Schneider, Michael ; Schmid, Ulrich Performance of thin AlxOy, SixNy and AlN passivation layers for high temperature SAW device applicationsArtikel Article Jul-2018
65Fischeneder Martin - 2018 - Enhanced process stability for the low temperature...pdf.jpgFischeneder, Martin ; Bittner, Achim ; Schneider, Michael ; Schmid, Ulrich Enhanced process stability for the low temperature sputter deposition of aluminium nitride thin filmsArticle Artikel Jun-2018
66Hajian, Ali ; Stöger-Pollach, Michael ; Schneider, Michael ; Müftüoglu, Doruk ; Crunwell, Frank K. ; Schmid, Ulrich Porosification behaviour of LTCC substrates with potassium hydroxideArtikel Article 3-Feb-2018
67Leitgeb, Markus ; Zellner, Christopher ; Dorfmeister, Manuel ; Schneider, Michael ; Schmid, Ulrich Buckling Porous SiC MembranesKonferenzbeitrag Inproceedings2018
68Schneider, Michael ; Schmid, Ulrich Piezoelectric MEMS Devices: from Material Aspects to Low-Power ApplicationsKonferenzbeitrag Inproceedings2018
69Schneider, Michael ; Schmid, Ulrich Substrate Temperature and Bias Voltage Dependent Properties of Sputtered AlN Thin Films for BAW ApplicationsKonferenzbeitrag Inproceedings2018
70Hajian, Ali ; Stöger-Pollach, Michael ; Schneider, Michael ; Homolka, Heinz ; Müftüoglu, Doruk ; Schmid, Ulrich Effect of sintering temperature on porosification behavior of fired LTCC substratesKonferenzbeitrag Inproceedings2018
71Hafner, Jonas ; Teuschel, Marco ; Schrattenholzer, Jürgen ; Schneider, Michael ; Schmid, Ulrich Optimized Batch Process for Organic MEMS DevicesKonferenzbeitrag Inproceedings2018
72Patocka, Florian ; Schlögl, Matthias ; Schneider, Michael ; Schmid, Ulrich Novel MEMS Sensor for Detecting Magnetic Particles in LiquidsKonferenzbeitrag Inproceedings2018
73Dorfmeister, Manuel ; Kössl, Bernhard ; Schneider, Michael ; Schmid, Ulrich A Novel Bi-Stable MEMS Membrane Concept Based on a Piezoelectric Thin Film Actuator for Integrated SwitchingKonferenzbeitrag Inproceedings2018
74Fischeneder, M. ; Kucera, M. ; Hofbauer, F. ; Pfusterschmied, G. ; Schneider, M. ; Schmid, U. Q-factor enhancement of piezoelectric MEMS resonators in liquidswith active feedbackArtikel Article 2018
75Schmid, P. ; Zarfl, C. ; Triendl, F. ; Maier, F.J. ; Schwarz, S. ; Schneider, M. ; Schmid, U. Impact of adhesion promoters and sputter parameters on theelectro-mechanical properties of Pt thin films at high temperaturesArtikel Article 2018
76Dorfmeister, M. ; Schneider, M. ; Schmid, U. Static and dynamic performance of bistable MEMS membranesArtikel Article 2018
77Wistrela, E. ; Schmied, I. ; Schneider, M. ; Gillinger, M. ; Mayrhofer, P.M. ; Bittner, A. ; Schmid, U. Impact of sputter deposition parameters on the microstructural and piezoelectric properties of Cr x Al 1−x N thin filmsArtikel Article 2018
78Iannacci, J. ; Serra, E. ; Sordo, G. ; Bonaldi, M. ; Borrielli, A. ; Schmid, U. ; Bittner, A. ; Schneider, M. ; Kuenzig, T. ; Schrag, G. ; Pandraud, G. ; Sarro, P. M. MEMS-based multi-modal vibration energy harvesters for ultra-low power autonomous remote and distributed sensingArtikel Article 2018
79Patocka, Florian ; Schneider, Michael ; Schneidhofer, C. ; Dörr, Nicole ; Schmid, Ulrich Novel MEMS Sensor for Real-time Lubricant Condition MonitoringKonferenzbeitrag Inproceedings2018
80Fischeneder, Martin ; Oposich, Martin ; Schneider, Michael ; Schmid, Ulrich Tuneable Q-Factor of MEMS Cantilevers with Integrated Piezoelectric Thin FilmsArtikel Article 2018