Title: Aluminiumoxidabscheidung durch Plasma - CVD
Language: Deutsch
Authors: Fink, Markus 
Qualification level: Doctoral
Advisor: Laimer, Johann
Issue Date: 2003
Number of Pages: 191
Qualification level: Doctoral
Keywords: Aluminiumoxide; PECVD-Verfahren
URI: https://resolver.obvsg.at/urn:nbn:at:at-ubtuw:1-10901
http://hdl.handle.net/20.500.12708/12149
Library ID: AC04053891
Organisation: E134 - Institut für Allgemeine Physik 
Publication Type: Thesis
Hochschulschrift
Appears in Collections:Thesis

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