| Title: | Aluminiumoxidabscheidung durch Plasma - CVD | Language: | Deutsch | Authors: | Fink, Markus | Qualification level: | Doctoral | Advisor: | Laimer, Johann | Issue Date: | 2003 | Number of Pages: | 191 | Qualification level: | Doctoral | Keywords: | Aluminiumoxide; PECVD-Verfahren | URI: | https://resolver.obvsg.at/urn:nbn:at:at-ubtuw:1-10901 http://hdl.handle.net/20.500.12708/12149 |
Library ID: | AC04053891 | Organisation: | E134 - Institut für Allgemeine Physik | Publication Type: | Thesis Hochschulschrift |
| Appears in Collections: | Thesis |
Files in this item:
| File | Description | Size | Format | |
|---|---|---|---|---|
| Fink Markus - 2003 - Aluminiumoxidabscheidung durch Plasma - CVD.pdf | 7.93 MB | Adobe PDF |  View/Open |
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