| Title: | Focused Ion Beam basierte Metallisierung für sub - 100nm - Bauelemente | Language: | Deutsch | Authors: | Langfischer, Helmut | Qualification level: | Doctoral | Advisor: | Bertagnolli, Emmerich | Issue Date: | 2003 | Number of Pages: | 129 | Qualification level: | Doctoral | Keywords: | Bauelement; Metallisieren; Wolfram; Ionenplattieren; Galliumion | URI: | https://resolver.obvsg.at/urn:nbn:at:at-ubtuw:1-11259 http://hdl.handle.net/20.500.12708/12166 |
Library ID: | AC04080670 | Organisation: | E362 - Institut für Festkörperelektronik | Publication Type: | Thesis Hochschulschrift |
| Appears in Collections: | Thesis |
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