| Title: | Focused Ion Beam basierte Metallisierung für sub - 100nm - Bauelemente | Language: | Deutsch | Authors: | Langfischer, Helmut | Qualification level: | Doctoral | Advisor: | Bertagnolli, Emmerich | Issue Date: | 2003 | Number of Pages: | 129 | Qualification level: | Doctoral | URI: | https://resolver.obvsg.at/urn:nbn:at:at-ubtuw:1-11259 http://hdl.handle.net/20.500.12708/12166 |
Library ID: | AC04080670 | Organisation: | E362 - Institut für Festkörperelektronik | Publication Type: | Thesis Hochschulschrift |
| Appears in Collections: | Thesis |
Files in this item:
| File | Description | Size | Format | |
|---|---|---|---|---|
| Focused Ion Beam basierte Metallisierung fuer sub - nm - Bauelemente.pdf | 12.23 MB | Adobe PDF |  View/Open |
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