Title: Focused Ion Beam basierte Metallisierung für sub - 100nm - Bauelemente
Language: Deutsch
Authors: Langfischer, Helmut 
Qualification level: Doctoral
Advisor: Bertagnolli, Emmerich
Issue Date: 2003
Number of Pages: 129
Qualification level: Doctoral
Keywords: Bauelement; Metallisieren; Wolfram; Ionenplattieren; Galliumion
URI: https://resolver.obvsg.at/urn:nbn:at:at-ubtuw:1-11259
http://hdl.handle.net/20.500.12708/12166
Library ID: AC04080670
Organisation: E362 - Institut für Festkörperelektronik 
Publication Type: Thesis
Hochschulschrift
Appears in Collections:Thesis

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