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Record link: 
http://hdl.handle.net/20.500.12708/131254
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Title: 
XRR & GiXRF combined analysis of Plasma Immersion Ion Implantation Ultra-Shallow junctions
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Citation: 
Caby, B., Ingerle, D., Pepponi, G., Streli, C., Nolot, E., Mazen, F., Morales, M., & Chateigner, D. (2014). XRR & GiXRF combined analysis of Plasma Immersion Ion Implantation Ultra-Shallow junctions. EXRS 2014, Bologna, Italy, EU. http://hdl.handle.net/20.500.12708/131254
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Publication Type: 
Presentation - Keynote presentation
en
Authors: 
Caby, B. 
Ingerle, D. 
Pepponi, Giancarlo 
Streli, Christina 
Nolot, E. 
Mazen, F. 
Morales, M. 
Chateigner, D. 
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Organisational Unit: 
E141-05 - Forschungsbereich Radiation Physics 
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Date (published): 
2014
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Event name: 
EXRS 2014 
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Event date: 
16-Jun-2014 - 20-Jun-2014
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Event place: 
Bologna, Italy, EU
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Science Branch: 
Physik, Astronomie
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Appears in Collections:
Presentation

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