Title: Microsystems for particle analysis
Language: English
Authors: Nieuwenhuis, Jeroen Hans 
Qualification level: Doctoral
Advisor: Telleman, P. 
Assisting Advisor: Vellekoop, Michael J.
Issue Date: 2005
Number of Pages: 99
Qualification level: Doctoral
Abstract: 
The thesis discusses the development of four new microsystems for the analysis of small particles (diameter 5-50 µm). The microsystems have been designed to take advantage of the unique physics found at the micro-scale. IC-technology has been used to fabricate the microsystems on a common silicon-glass platform.
Keywords: Mikrosystemtechnik; Teilchen; Mikrometerbereich; Analyse
URI: https://resolver.obvsg.at/urn:nbn:at:at-ubtuw:1-19375
http://hdl.handle.net/20.500.12708/13879
Library ID: AC04582902
Organisation: E366 - Institut für Sensor- und Aktuatorsysteme 
Publication Type: Thesis
Hochschulschrift
Appears in Collections:Thesis

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