Kainz, A. F. H., Hortschitz, W., Steiner, H., Schalko, J., Jachimowicz, A., & Keplinger, F. (2017). Accurate Analytical Model for Air Damping in Lateral MEMS/MOEMS Oscillators. Sensors and Actuators A: Physical, 255, 154–159. https://doi.org/10.1016/j.sna.2016.12.023