Record link: 
http://hdl.handle.net/20.500.12708/147649
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Title: 
MOEMS transducer with a non-linear transfer characteristic for static displacement measurement applications on the example of an inclination sensor
en
Citation: 
Steiner, H., Hortschitz, W., Kainz, A. F. H., Stifter, M., Jachimowicz, A., Schalko, J., Keplinger, F., & Kohl, F. (2017). MOEMS transducer with a non-linear transfer characteristic for static displacement measurement applications on the example of an inclination sensor. Sensors and Actuators A: Physical, 263, 727–732. https://doi.org/10.1016/j.sna.2017.05.035
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Publisher DOI: 
10.1016/j.sna.2017.05.035
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Publication Type: 
Article - Original Research Article
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Language: 
English
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Authors: 
Steiner, Harald 
Hortschitz, Wilfried 
Kainz, Andreas Franz Hubert 
Stifter, Michael 
Jachimowicz, Artur 
Schalko, Johannes 
Keplinger, Franz 
Kohl, F. 
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Organisational Unit: 
E366-01 - Forschungsbereich Mikro- und Nanosensorik 
E366-50 - Services des Instituts 
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Journal: 
Sensors and Actuators A: Physical 
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ISSN: 
0924-4247
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Date (published): 
30-May-2017
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Number of Pages: 
6
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Publisher: 
ELSEVIER SCIENCE SA
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Peer reviewed: 
Yes
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Keywords: 
Electrical and Electronic Engineering; Condensed Matter Physics; Electronic, Optical and Magnetic Materials; Instrumentation; Surfaces, Coatings and Films; Metals and Alloys; MOEMS Static displacement Non-linear transfer characteristic Resolution Indination
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Research Areas: 
Sensor Systems: 45%
Special and Engineering Materials: 35%
Materials Characterization: 20%
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Science Branch: 
Elektrotechnik, Elektronik, Informationstechnik
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