Record link: 
http://hdl.handle.net/20.500.12708/153650
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Title: 
SiC Process Technologies for MEMS
en
Citation: 
Schmid, U., Schneider, M., Leitgeb, M., & Pfusterschmied, G. (2022). SiC Process Technologies for MEMS [Conference Presentation]. MNE 2022 - Eurosensors, Leuven, Belgium.
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Publication Type: 
Presentation - Conference Presentation
en
 
Vortrag - Conference Presentation
de
Language: 
English
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Authors: 
Schmid, Ulrich 
Schneider, Michael 
Leitgeb, Markus 
Pfusterschmied, Georg 
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Organisational Unit: 
E366-02 - Forschungsbereich Mikrosystemtechnik 
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Date (published): 
2022
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Event name: 
MNE 2022 - Eurosensors 
en
Event date: 
19-Sep-2022 - 22-Sep-2022
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Event place: 
Leuven, Belgium
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Keywords: 
SiC; Process technologies; MEMS
en
Research Areas: 
Sensor Systems: 100%
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Science Branch: 
2020 - Elektrotechnik, Elektronik, Informationstechnik: 100%
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