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Record link:
http://hdl.handle.net/20.500.12708/159140
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Title:
Untersuchung von ALD high-k Oxiden in MIM-Kondensatoren und Optimierung der Spannungs-Nichtlinearität für Zirkonoxid
de
Citation:
Simsek, S. (2014).
Untersuchung von ALD high-k Oxiden in MIM-Kondensatoren und Optimierung der Spannungs-Nichtlinearität für Zirkonoxid
[Diploma Thesis, Technische Universität Wien]. reposiTUm. http://hdl.handle.net/20.500.12708/159140
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CatalogPlus:
AC12102921
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Publication Type:
Thesis - Diploma Thesis
en
Hochschulschrift - Diplomarbeit
de
Language:
German
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Authors:
Simsek, Sinan
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Advisor:
Bertagnolli, Emmerich
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Co-advisor:
Bethge, Ole
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Organisational Unit:
E362 - Institut für Festkörperelektronik
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Date (published):
2014
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Number of Pages:
98
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Additional information:
Zsfassung in engl. Sprache
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Appears in Collections:
Thesis
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